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US 6,800,336 B1Granted
Method and device for plasma coating surfaces
OwnerPeter Förnsel, Christian Buske +4inventors
InventorsPeter Förnsel, Christian Buske, Uwe Hartmann, Alfred Baalmann, Guido Ellinghorst, Klaus D Vissing
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Abstract
A method for coating surfaces, for which a precursor material is caused to react with the help of plasma and the reaction product is deposited on a surface, the reaction as well as the deposition taking place at atmospheric pressure, such that a plasma jet is generated by passing a working gas through an excitation zone and the precursor material is supplied with a lance separately from the working gas to the plasma jet.
Claims15
A method for coating surfaces, comprising the steps of:
- generating a plasma jet by passing a working gas through an excitation zone and by applying a high frequency AC voltage to electrodes positioned in the excitation zone to produce an arc discharge,
- supplying a precursor material separately from the working gas to the plasma jet to cause the precursor material to react with the help of plasma in the plasma jet,
- depositing a reaction product from said reaction on a surface, and
- providing that the reaction as well as the deposition takes place at atmospheric pressure.
1 more element
A device for coating surfaces comprising:
- a plasma nozzle housing which is tubular and electrically conductive and which forms a nozzle channel through which a working gas flows,
- an arrangement for generating a plasma jet by excitation of the working gas, said arrangement including:
- an electrode disposed coaxially in the nozzle channel, and
- a high frequency generator for applying a high frequency AC voltage between the electrode and the housing in such a manner that the working gas, on flowing through the nozzle channel, is excited by means of an electric arc discharge thereat, and
- a supplying device which supplies a precursor material to the plasma jet separately from the working gas.
2 more elements
Dependencies are inferred from the claim text.