US 6,798,863 B2 · Combined x-ray analysis apparatus

Abstract

In order to provide a single, small apparatus capable of elemental and structural analysis of inorganic matter by utilizing X-rays having non-obstructive and non-contact characteristics there is provided a small, energy distribution type X-ray detector for detecting X-ray fluorescence and subjecting the X-ray fluorescence to elemental and quantative analysis, and a CCD line sensor for performing structural analysis. An X-ray tube target structure that is a Cu layer on an Mo layer is adopted. When excitation is performed using a low accelerating voltage, this is made monochromatic by using a Cu filter to filter the Cu—K lines and the continuous X-rays generated, with the radiation quality (Cu—K lines) thus generated then being utilized in X-ray diffraction. When excitation is performed using a high accelerating voltage, Cu—K lines of the Cu—K lines, Mo—K lines and continuous X-rays thus generated are blocked by absorption using an Mo or Zr filter, with the Mo—K lines and continuous X-rays thus obtained being utilized in X-ray fluorescence analysis.

Claims10

Dependent claims

A combined X-ray analysis apparatus for performing X-ray fluorescence analysis and X-ray diffraction analysis, comprising:

a shared portion used for performing X-ray fluorescence analysis and X-ray diffraction analysis and comprised of an X-ray high voltage power supply, an X-ray tube driven by the X-ray high voltage power supply to produce a primary X-ray beam, a shutter disposed in the path of the primary X-ray beam, a collimator for collimating the primary X-ray beam, a sample stage for supporting a sample in the path of the primary X-ray beam, a sample monitoring optical system for monitoring the sample, and a control unit for controlling the apparatus;
an energy distributed type X-ray detector disposed proximate the sample stage for detecting a fluorescent X-ray emitted by the sample in response to irradiation with the primary X-ray beam and subjecting the fluorescent X-ray to elemental qualative and quantative analysis of the sample;
and
a CCD sensor disposed proximate the sample stage for performing structural analysis of the sample;
wherein the control unit controls the X-ray high voltage power supply depending upon a type of analysis to be performed such that the high voltage power supply supplies a low acceleration voltage to the X-ray tube to emit a primary X-ray beam for performing X-ray diffraction using the CCD sensor, and supplies a high acceleration voltage to the X-ray tube to emit a primary X-ray beam for performing X-ray fluorescence analysis using the energy distributed type X-ray detector.

2 more elements

A combined X-ray analysis apparatus for performing X-ray fluorescence analysis and X-ray diffraction analysis, comprising:

a shared portion used for performing X-ray fluorescence analysis and X-ray diffraction analysis and comprised of an X-ray high voltage power supply, an X-ray tube driven by the X-ray high voltage power supply to produce a primary X-ray beam, a collimator for collimating the primary X-ray beam, a sample stage for supporting a sample in the path of the primary X-ray beam, and a control unit for controlling the apparatus;
an energy distributed type X-ray detector disposed proximate the sample stage for detecting a fluorescent X-ray emitted by the sample in response to irradiation with the primary X-ray beam and subjecting the fluorescent X-ray to elemental qualative and quantative analysis of the sample;
and
a CCD sensor disposed proximate the sample stage for performing structural analysis of the sample;
wherein the control unit controls the X-ray high voltage power supply depending upon a type of analysis to be performed such that the high voltage power supply supplies a low acceleration voltage to the X-ray tube to emit a primary X-ray beam for performing X-ray diffraction using the CCD sensor, and supplies a high acceleration voltage to the X-ray tube to emit a primary X-ray beam for performing X-ray fluorescence analysis using the energy distributed type X-ray detector.

2 more elements

Dependencies are inferred from the claim text.

Combined x-ray analysis apparatus

Life of this patent

Combined x-ray analysis apparatus

Life of this patent

Abstract

Claims10