Device and method for producing a calcium-rich getter thin film
AssigneeSaes Getters S.P.A.
InventorsCorrado Carretti, Luca Toia
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Abstract
An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.
Claims15
In a method for depositing a calcium getter film in an electronic vacuum device, by vaporizing a powder of a Ca—Al alloy within a sealed device under vacuum, an improvement for substantially reducing the amount of hydrogen released during said vaporizing comprising,
- substituting for the Ca—Al alloy powder, a powder of a Ca—Ba—Al ternary alloy composed of between 50% and 60% by weight of aluminum, between 30% and 45% by weight of calcium and between 1.5% and 15% by weight of barium.
A getter device for use in forming a calcium getter film in an electronic vacuum device, comprising a heatable container containing a powder of a ternary Ca—Ba—Al alloy composed of between 50% and 60% by weight of aluminum, between 30% and 45% by weight of calcium and between 1.5% and 15% by weight of barium.
An electronic vacuum device comprising
- a sealed enclosure under vacuum and having an interior wall surface, and
- coating said wall surface with a thin film composed of between 70% and 97% by weight calcium and 3% and 30% by weight barium.
A method for substantially reducing the amount of hydrogen released during the forming of a getter film in an electronic vacuum device, wherein the formation of said getter film includes vaporizing a powder of a Ca—Ba—Al ternary alloy within a sealed device under vacuum, wherein said alloy is composed of between 50% and 60% by weight of aluminum, between 30% and 45% by weight of calcium and between 1.5% and 15% by weight of barium.
Dependencies are inferred from the claim text.