Integrated circuit device characterization
AssigneeIntel Corporation
InventorDonald S. Gardner
Life of this patent
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Abstract
One or more electrical characteristics of an integrated circuit device are measured at one or more relatively lower frequencies. One or more parameters of the integrated circuit device are measured at one or more frequencies higher than the one or more relatively lower frequencies. One or more parameters of the integrated circuit device are calculated based on the measured one or more electrical characteristics. The integrated circuit device is characterized based on the calculated one or more parameters and the measured one or more parameters.
Claims26
An apparatus comprising:
- an impedance analyzer to measure one or more electrical characteristics of an integrated circuit device at one or more relatively lower frequencies;
- a network analyzer to measure one or more parameters of the integrated circuit device at one or more frequencies higher than the one or more relatively lower frequencies;
- and
- a data processing system to calculate one or more parameters of the integrated circuit device based on the measured one or more electrical characteristics and to characterize the integrated circuit device based on the calculated one or more parameters and the measured one or more parameters.
An apparatus comprising:
- (a) means for measuring one or more electrical characteristics of an integrated circuit device at one or more relatively lower frequencies;
- (b) means for measuring one or more parameters of the integrated circuit device at one or more frequencies higher than the one or more relatively lower frequencies;
- (c) means for calculating one or more parameters of the integrated circuit device based on the measured one or more electrical characteristics;
- and
- (d) means for characterizing the integrated circuit device based on the calculated one or more parameters and the measured one or more parameters.
An apparatus comprising:
- an impedance analyzer to measure a value for one or more circuit elements of an electrical model of an integrated circuit device at one or more relatively lower frequencies;
- a network analyzer to measure one or more parameters of the integrated circuit device at one or more frequencies higher than the one or more relatively lower frequencies;
- and
- a data processing system to calculate one or more parameters of the integrated circuit device based on the measured value for one or more circuit elements of the electrical model, to compare the calculated one or more parameters to the measured one or more parameters, and to update one or more values for the electrical model of the integrated circuit device.
An apparatus comprising:
- (a) means for measuring a value for one or more circuit elements of an electrical model of an integrated circuit device at one or more relatively lower frequencies;
- (b) means for measuring one or more parameters of the integrated circuit device at one or more frequencies higher than the one or more relatively lower frequencies;
- (c) means for calculating one or more parameters of the integrated circuit device based on the measured value for one or more circuit elements of the electrical model;
- (d) means for comparing the calculated one or more parameters to the measured one or more parameters;
- and
- (e) means for updating one or more values for the electrical model of the integrated circuit device.
Dependencies are inferred from the claim text.