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US 6,789,052 B1Granted
Method of using control models for data compression
AssigneeAdvanced Micro Devices, Inc.
InventorAnthony John Toprac
Life of this patent
Estimating the term…
Abstract
A method is provided for compressing data. The method comprises collecting processing data representative of a process. The method further comprises modeling the collected processing data using a control model. The method also comprises applying the control model to compress the collected processing data.
Claims48
A method comprising:
- collecting processing data representative of a process;
- applying a control model to model the collected processing data;
- and
- applying the control model to compress the collected processing data.
1 more element
A computer readable, program storage device encoded with instructions that, when executed by a computer, perform a method, the method comprising:
- collecting processing data representative of a process;
- applying a control model to model the collected processing data;
- and
- applying the control model to compress the collected processing data.
1 more element
A computer programmed to perform a method, the method comprising:
- collecting processing data representative of a process;
- applying a control model to model the collected processing data;
- and
- applying the control model to compress the collected processing data.
1 more element
A method comprising:
- collecting processing data (xi,yi), where i=1, 2, . . . , M, representative of a process;
- applying a control model to model the collected processing data said control model having at most N+1 parameters, wherein 2M is greater than N+1;
- and
- applying the control model to compress the collected processing data to have a data compression ratio of at least about 2M:(N+1).
1 more element
A system, comprising:
- a processing tool to process a semiconductor wafer;
- a controller comprising a control model to acquire and model processing data relating to said processing of said semiconductor wafer, said control model to compress said modeled processing data.
An apparatus, comprising:
- a controller comprising a control model to acquire and model processing data relating to a process performed on a semiconductor wafer, said control model to compress said processing data.
Dependencies are inferred from the claim text.