Method of statistical binning for reliability selection
AssigneeInternational Business Machines Corporation
InventorsTange N. Barbour, Thomas S. Barnett, Matthew S. Grady, Kathleen G. Purdy
Life of this patent
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Abstract
A statistical method is described for reliability selection of dies on semiconductor wafers using critical wafer yield parameters. This is combined with other data from the wafer or module level reliability screens (such as voltage screen or burn-in) to obtain the relative latent defect density. Finally the modeled results are compared with actual results to demonstrate confidence in the model.
Claims11
A statistical method for reliability selection of dies on semiconductor wafers to be tested comprising:
- collecting test data from each of a plurality of wafers to obtain actual results of each die;
- extracting a yield model of certain parameters from the test data;
- and
- comparing the yield model and actual reliability data to obtain a distribution of good die reliability fails based on negative binomial statistical modeled results and actual results.
A statistical method for reliability selection of dies on semiconductor wafers to be tested comprising:
- collecting test data from each of a plurality of wafers to obtain actual results of each die;
- extracting a yield model of certain parameters from the test data;
- analyzing the test data to determine relationships between the dies wherein the resultant relationship is the number of embedded repairs on a particular die;
- and
- comparing the yield model and actual reliability data to obtain a distribution of good die reliability fails based on modeled results and actual results.
A statistical method for reliability selection of dies on semiconductor wafers to be tested comprising:
- collecting test data from each of a plurality of wafers to obtain actual results of each die;
- extracting a yield model of certain parameters from the test data wherein parameters include killer defects per wafer, degree of clustering of idler defects, and the ratio of latent defects to killer defects;
- and
- comparing the yield model and actual reliability data to obtain a distribution at good die reliability fails based on modeled results and actual results.
A statistical method for reliability selection of dies on semiconductor wafers to be tested comprising:
- collecting test data from each of a plurality of wafers to obtain actual results of each die;
- comparing the yield model and actual reliability data to obtain a distribution of good die reliability fails based on modeled results and actual results wherein the parameters are used to calculate the distribution of good die in each bin category and distribution of reliability fails in each bin.
A statistical method for reliability selection of dies on semiconductor wafers to be tested comprising:
- collecting test data from each of a plurality of wafers,
- determining certain parameters based on average number of killer defects in a wafer;
- computing the number of embedded repairs for each die;
- classifying the die into a number of bins based on the number of repairs and clustering to determine the distribution of good die in each bin;
- and
- comparing the classification of the die with actual distributions.
A statistical method for reliability selection of dies on semiconductor wafers to be tested comprising:
- collecting test data from each of a plurality of wafers;
- determining certain parameters based on average number of killer defects in a wafer wherein the parameters include clustering of defects and defect density;
- computing the number of embedded repairs for each die;
- classifying the die into a number of bins based on the number of repairs and clustering to determine the distribution of good die in each bin;
- and
- comparing the classification of the die with actual distributions.
Dependencies are inferred from the claim text.