Multiplexed analog control system for electrostatic actuator array
AssigneeMovaz Networks, Inc.
InventorsSteven L. Garverick, Jun Guo, Narayanan Rajan
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Abstract
A multiplexed analog control system for an micro electromechanical systems (MEMS) array of electrostatic actuators, such as tiltable mirrors in an optical switch. Each actuator includes a variable gap capacitor formed as part of the movable mechanical element. A hold capacitor is connected to each actuator capacitor, and a selectable high-voltage inverter connects them to provide a bipolar drive signal of 50% duty cycle. A single power digital controlled current source is connected to all the drive circuits to provide a high-power correction signal. Address decoders enable a selected one of the drive circuits to add or subtract the correction from the hold capacitor.
Claims4
A control system in an electrostatic actuator array, comprising:
- a first plurality of electromechanical elements formed in a substrate and having respective movable mechanical elements forming part of respective actuator capacitors;
- a first plurality of hold capacitors coupled to said respective ones of said actuator capacitors:
- a first plurality of selectable inverters coupling respective hold capacitors to respective actuator capacitors;
- a common source of a selectably variable analog drive power signal, wherein said common source of said selectably variable analog drive power signal comprises a digital to analog converter producing a signal selectively controlling a magnitude of said common source of said selectably variable analog drive power signal;
- a first plurality of driver circuits all receiving said drive power signal and including a switching path connected to respective ones of said hold capacitors controlled according to address signals supplied to said driver circuits;
- and
- at least one address decoder providing distinctive address signals to said driver circuits.
Dependencies are inferred from the claim text.