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AssigneeNorthrop Grumman Corporation
InventorsRobert E. Stewart, Agop H. Cherbettchian, Samuel Fersht, David B. Hall
Estimating the term…
A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. The mirror blocks or reflects the optical axis. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.
A micro-actuator responsive to a control signal having a first state and a second state comprising:
A micro-actuator comprising:
Dependencies are inferred from the claim text.