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US 6,788,836 B2Granted
Multi-level waveguide
AssigneeIntel Corporation
InventorVenkatesan Murali
Life of this patent
Estimating the term…
Abstract
A multi-level waveguide to transmit light through a series of substrates. The multi-level waveguide is made up of stacked substrates, each containing a two dimensional array of transparent material filled vias. Transparent materials such as optical fiber, cladding, and gas may be used to provide a pathway for light. Optionally, a conductive layer may be deposited on a substrate in the multi-level waveguide. The conductive layer can then interact with the multi-level waveguide through light detecting devices such as photodetectors.
Claims9
An apparatus, comprising:
- a first semiconductor substrate having a first opening therethrough, the first opening to guide an optical signal therein;
- a substantially horizontal core pathway on top of the first semiconductor substrate optically coupled to the first opening to guide the optical signal received from the first opening;
- a first cladding layer on top of-the substantially horizontal core pathway;
- and
- an alignment marker on a surface of the first semiconductor substrate, the alignment marker to align a second substrate with the first semiconductor substrate for coupling the second substrate to the surface of the first semiconductor substrate.
2 more elements
An apparatus, comprising:
- a first semiconductor substrate having a first opening therethrough, the first opening to guide an optical signal therein;
- a substantially horizontal core pathway on top of the first semiconductor substrate optically coupled to the first opening to guide the optical signal received from the first opening;
- and
- a first cladding layer on top of-the substantially horizontal core pathway, wherein the first semiconductor substrate includes an optical electronic integrated circuit (“OEIC”) for converting the optical signal to an electrical signal.
1 more element
Dependencies are inferred from the claim text.