Micromachined capacitive component with high stability

A micromachined capacitive electrical component having

• a support structure with a surface,
• a rigid plate secured to the surface of the support structure by means of support arms directly interconnecting the rigid plate and the support structure at a plurality of discrete locations,
• a diaphragm having a layer of a substantially non-conductive material, the diaphragm having a periphery and being secured to the support structure along its periphery at a predetermined distance from the rigid plate, whereby the rigid plate and the diaphragm define an air gap therebetween,
• the rigid plate having a surface facing the air gap carrying an electrically conductive surface portion on the surface facing the air gap, and the diaphragm having a surface facing the air gap carrying an electrically conductive surface portion on the surface facing the air gap, where, for each support arm, at least one of the electrically conductive surface portions is separated from the corresponding discrete location by a distance along the surface carrying the respective electrically conductive surface portion.