Semiconductor optical component and a method of fabricating it
AssigneeAvanex Corporation
InventorsPatrick Garabedian, Christian Brot
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Abstract
A semiconductor optical component is disclosed which comprises a current injection region and at least one electrically isolated region referred to as a first plateau, each region containing a contact layer of an alloy based on gallium arsenide, GaAs, deposited on a semiconductor material upper confinement layer. The component further comprises in the first plateau a dielectric material isolation layer on top of the contact layer. An attachment layer is disposed between the contact layer and the isolation layer to increase the adhesion of the isolation layer to the contact layer. A method of fabricating the above kind of component is also disclosed.
Claims18
A semiconductor optical component comprising a current injection region and at least one electrically isolated region referred to as a first plateau, each region containing a contact layer of an alloy based on gallium arsenide, GaAs, deposited on a semiconductor material upper confinement layer,
- said component further comprising in said first plateau a dielectric material isolation layer on top of said contact layer,
- and in which component an attachment layer is disposed between said contact layer and said isolation layer to increase the adhesion of said isolation layer to said contact layer.
A method of fabricating a semiconductor optical component comprising a current injection region and at least one electrically isolated region, said method including the following steps:
- a step of depositing a contact layer of an alloy based on GaAs on a semiconductor material upper confinement layer, and
- a subsequent step of depositing a masking layer of a silicon nitride type dielectric material on said contact layer,
- which method further includes an intermediate step of depositing an attachment layer between said contact layer and said masking layer to increase the adhesion of said masking layer to said contact layer.
Dependencies are inferred from the claim text.