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US 6,788,552 B1Granted
Method and apparatus for reducing substrate bias voltage drop
AssigneeMicron Technology, Inc.
InventorsTongbi Jiang, Zhiqiang Wu
Life of this patent
Estimating the term…
Abstract
A semiconductor device is provided with a conductive layer provided on a backside of a semiconductor substrate. The conductive layer helps maintain a uniform bias voltage over the substrate. The conductive layer can also be used to apply a bias voltage to the substrate and reduce the number of bias voltage distribution regions required.
Claims58
A semiconductor device comprising:
- a semiconductor substrate;
- at least one electrical element circuit fabricated on an upper side of said substrate;
- a plurality of bias voltage distribution regions fabricated over said upper side of said substrate for receiving a bias voltage and providing said bias voltage to said substrate;
- and
- an electrically conductive unbiased layer provided on a back side of said substrate, said layer being adapted to receive an electric charge related to unwanted voltages and electrical noise from a first region of said substrate and return an electric charge to a second different region of said substrate to maintain a uniform bias voltage throughout the substrate.
2 more elements
A processor system comprising:
- a processor;
- a memory device in electrical communication with said processor;
- at least one of said memory device and said processor comprising:
- a semiconductor substrate;
- at least one electrical element fabricated on an upper side of said substrate;
- a plurality of bias voltage distribution regions fabricated over said upper side of said substrate for receiving a bias voltage and providing said bias voltage to said substrate;
- and
- an electrically conductive unbiased layer provided on a back side of said substrate, said layer being adapted to receive an electric charge related to unwanted voltages and electrical noise from a first region of said substrate and return an electric charge to a second different region of said substrate to maintain a uniform bias voltage throughout the substrate.
5 more elements
A semiconductor device comprising:
- a semiconductor substrate;
- at least one electrical element fabricated on said substrate;
- and
- an electrically conductive unbiased layer provided on a back side of said substrate, said conductive layer forming an electrical path for removing unwanted voltages and electrical noise from said substrate at a first region thereof and returning said unwanted voltages and electrical noise to said substrate at a second different region thereof to maintain a uniform bias voltage throughout the substrate.
1 more element
A semiconductor device comprising:
- a semiconductor substrate;
- at least one electrical element fabricated on an upper side of said substrate;
- a plurality of bias voltage distribution regions fabricated over said upper side of said substrate for receiving a bias voltage and providing said bias voltage to at least some portion of said substrate;
- and
- an electrically conductive unbiased layer provided on a backside of said substrate, said conductive layer forming an electrical path thereby equalizing unwanted voltages and electrical noise on said substrate between a first region of said substrate and a second different region of said substrate to maintain a uniform bias voltage throughout the substrate.
2 more elements
A processor system comprising:
- a processor;
- a memory device in electrical communication with said processor;
- at least one of said memory device and said processor comprising:
- a semiconductor substrate;
- at least one electrical element fabricated on an upper side of said substrate;
- a plurality of bias voltage distribution regions fabricated over said upper side of said substrate for receiving a bias voltage and providing said bias voltage to said substrate, said bias voltage distribution regions including an electrically conductive plug and a metallization layer;
- and
- an electrically conductive unbiased layer provided on a back side of said substrate for transferring unwanted voltages and electrical noise across said substrate to maintain a uniform bias voltage throughout the substrate.
5 more elements
A semiconductor device comprising:
- a semiconductor substrate;
- at least one electrical element fabricated on an upper side of said substrate;
- a plurality of bias voltage distribution regions fabricated over said upper side of said substrate for receiving a bias voltage and providing said bias voltage to at least some portion of said substrate, said bias voltage distribution regions including an electrically conductive plug and a metallization layer;
- and
- an electrically conductive unbiased layer provided on a backside of said substrate, said conductive unbiased layer forming an electrical path between a first region of said substrate and a second region of said substrate for removing unwanted voltages and electrical noise from said substrate to maintain a uniform bias voltage throughout the substrate.
2 more elements
Dependencies are inferred from the claim text.