Optical bench
AssigneeCarl Zeiss SMT GmbH
InventorsArmin Schöppach, Paul Kaufmann, Hartmut Münker
Life of this patent
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Abstract
The invention relates to an optical bench that has a base plate and can be permanently connected to an associated component. A receiving element for other optical elements that is arranged in such a way in relation to the base plate with connecting elements that it is deformable in its entirety in relation to said base plate, is allocated to the same.
Claims58
An optical bench comprising a baseplate that is connected to a seating and can be connected to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the seating (19) comprises a monolithic member with internal bores for beam guiding.
An optical bench comprising a baseplate that is connected to a seating and can be connected to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the seating (19) comprises a housing-like hollow member comprising at least one aperture (18) for coupling optical signals (32, 34) in and out.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein leaf springs (31) are provided as the connecting elements (21).
An optical bench comprising a baseplate that is connected to a seating and connectible to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) that comprise articulations.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the seating (19) comprises a material that has a high ratio of thermal conductivity to thermal expansion coefficients.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to a baseplate (7) by connecting elements (21) and wherein the baseplate (7) comprises a triangular shape, with a perforation (11) arranged centrally and flange segments (9) by which the baseplate (7) is firmly secured to an associated component.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the baseplate (7) comprises a mounting structure (5) with reinforcements and wherein the baseplate (7) or the mounting structure (5) comprises support points (17) for coupling-on a telescope.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) that are heat-insulting and have a predetermined cross section for heat removal depending on their thermal conductivity.
An optical bench comprising a baseplate that is connected to a seating and is connectible to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the seating (19) is provided with a heat conducting strip (43) by which heat is removed on exceeding a predetermined temperature.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein a receiving unit (25) and a transmitting unit (23) are firmly secured to the seating (19).
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the baseplate comprises a mounting structure (5) comprising a connection (13) for an optical unit.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the optical bench is shape-stable in the temperature range of −40 through +70° C. required for use in space.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the seating comprises a ceramic material.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21) and wherein the baseplate is comprised at least partially of a metal.
An optical bench comprising a baseplate that is connected to a seating and is connectable to an associated component, the seating being arranged moveable in its entirety relative to the baseplate in such way that stresses arising in the baseplate are transformed into deformation of the baseplate relative to the seating, wherein the seating (19) comprises a hollow member for beam guiding, and is connected to the baseplate (7) by connecting elements (21), and wherein the seating comprises articulations that permit movement of the baseplate relative to the seating only by action of a predetermined minimum force.
Dependencies are inferred from the claim text.