Method and apparatus for dynamic DMD testing
AssigneeTexas Instruments Incorporated
InventorFred J. Reuter
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Abstract
A method and apparatus for measuring the transient behavior characteristics of individual micromirrors in a DMD micromirror array. The method and system use sampling techniques to measure an amount of light reflected by an individual micromirror as the entire micromirror array is stimulated with a pattern of alternating driving signals. Sampling is achieved by illuminating the DMD micromirror array with a high-speed illumination source that provides stroboscopic light flashes of very short time length. By synchronizing the light flashes with the mirror driving signal and measuring the amount of light reflected by the individual micromirrors at different points in time, the transient behavior characteristics of individual micromirrors in a DMD micromirror array can be measured with a high level of accuracy.
Claims31
A method of measuring the dynamic behavior of a DMD micromirror residing in a DMD micromirror array, the method comprising:
- providing a high-speed illumination source adapted to illuminate at least a portion of a DMD micromirror array;
- providing an integrating optical sensor adapted to measure light reflected by a DMD micromirror array;
- providing a DMD pattern generator;
- electrically connecting a DMD micromirror array to the DMD pattern generator;
- applying an alternating pattern of driving signals to the DMD micromirror array at a first periodic rate;
- illuminating the DMD micromirror array with at least one light flash that is synchronized with the alternating pattern of driving signals;
- and
- measuring an amount of light reflected from the DMD micromirror array over a first period of time with the integrating optical sensor, wherein the first period of time comprises at least one complete cycle of the alternating pattern of driving signals.
A method of measuring the dynamic behavior of a DMD micromirror residing in a DMD micromirror array, the method comprising:
- providing a high-speed illumination source adapted to illuminate at least a portion of a DMD micromirror array;
- providing an integrating optical sensor adapted to measure light reflected by a DMD micromirror array;
- providing a DMD pattern generator comprising a movable stage for mounting a DMD micromirror array;
- electrically connecting a DMD micromirror array to the DMD pattern generator;
- applying an alternating pattern of inversely related driving signals to the DMD micromirror array at a first periodic rate;
- illuminating the DMD micromirror array with a stroboscopic light flash lasting for a period of time that is about one half of the period of the driving signal, wherein the commencement of the light flash is synchronized with the commencement of a cycle of the alternating pattern of driving signals;
- and
- measuring an amount of light reflected from the DMD micromirror array over a first period of time with the integrating optical sensor, wherein the first period of time comprises at least one complete cycle of the alternating pattern of driving signals.
A method of measuring the dynamic behavior of a DMD micromirror residing in a DMD micromirror array, the method comprising:
- providing a high-speed illumination source adapted to illuminate at least a portion of a DMD micromirror array;
- providing an integrating optical sensor adapted to measure light reflected by a DMD micromirror array;
- providing a DMD pattern generator comprising a movable stage for mounting a DMD micromirror array;
- electrically connecting a DMD micromirror array to the DMD pattern generator;
- applying an alternating pattern of inversely related driving signals to the DMD micromirror array at a first periodic rate;
- illuminating the DMD micromirror array with a plurality of stroboscopic light flashes, wherein each of the stroboscopic light flashes lasts for a period of time that is less than half the period of the driving signal, and wherein the commencement of each of the light flashes is synchronized with the driving signal;
- and
- measuring an amount of light reflected from the DMD micromirror array over a first period of time with the integrating optical sensor, wherein the first period of time comprises at least five periods of the driving signal.
A system adapted for measuring the dynamic behavior of a DMD micromirror residing in a DMD micromirror array, the system comprising:
- a high-speed illumination source adapted to illuminate at least a portion of a DMD micromirror array;
- an integrating optical sensor adapted to measure light reflected by a DMD micromirror array;
- a DMD pattern generator electrically connected to the illumination source and the optical sensor;
- wherein the DMD pattern generator is adapted to apply an alternating pattern of driving signals to a DMD micromirror array that is mounted on the pattern generator at a first periodic rate;
- wherein the illumination source is adapted to illuminate the DMD micromirror array with at least one light flash that is synchronized with the alternating pattern of driving signals;
- and
- wherein the optical sensor is adapted to measure an amount of light reflected from the DMD micromirror array over a first period of time, wherein the first period of time comprises at least one complete cycle of the alternating pattern of driving signals.
Dependencies are inferred from the claim text.