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US 6,788,389 B2Granted
Production method of projection optical system
AssigneeNikon Corporation
InventorsYouhei Fujishima, Hironori Ikezawa, Toshihiko Ozawa, Yasuhiro Omura, Takeshi Suzuki
Life of this patent
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Abstract
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength. The projection optical system having at least one isometric system refractive member made of an isometric system crystal material. The isometric system crystal material transmits a light beam having the predetermined wavelength. The projection optical system also has an amorphous refractive member made of an amorphous material for compensating deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member.
Claims49
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength, comprising:
- at least one isometric system refractive member made of an isometric system crystal material that transmits a light beam having the predetermined wavelength, and
- an amorphous refractive member made of an amorphous material for compensating for deterioration of optical performance due to intrinsic birefringence of the isometric system refractive members,
- wherein the isometric system refractive member made of the isometric system crystal material includes a plurality of isometric system refractive members,
- wherein directions of the crystal axes of the plurality of isometric system refractive members are respectively determined in such a manner that the deterioration of the optical performance due to intrinsic birefringence is reduced,
- wherein the plurality of isometric system refractive members comprises:
- a first group of radiation transmissive members which are formed in such a manner that a crystal axis [100], or a crystal axis that is optically equivalent to the crystal axis [100], substantially coincides with the optical axis;
- and
- a second group of radiation transmissive members which are formed in such a manner that the crystal axis [100], or the crystal axis that is optically equivalent to the crystal axis [100], substantially coincides with the optical axis;
- and
- wherein the first group of the transmissive members and the second group of radiation transmissive members have a positional relationship in which they are rotated substantially 45 degrees relative to each other around the optical axis.
7 more elements
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength, comprising:
- at least one isometric system refractive member made of an isometric system crystal material that transmits a light beam having the predetermined wavelength, and
- an amorphous refractive member made of an amorphous material for compensating for deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member,
- wherein the isometric system refractive member made of the isometric system crystal material includes a plurality of isometric system refractive members,
- wherein directions of the crystal axes of the plurality of isometric system refractive members are respectively determined in such a manner that the deterioration of the optical performance due to intrinsic birefringence is reduced, wherein the plurality of isometric system refractive members comprises:
- a third group of radiation transmissive members which are formed in such a manner that a crystal axis [111], or a crystal axis that is optically equivalent to the crystal axis [111], substantially coincides with the optical axis;
- and
- a fourth group of radiation transmissive members which are formed in such a manner that the crystal axis [111], or the crystal axis that is optically equivalent to the crystal axis [111], substantially coincides with the optical axis;
- and
- wherein the third group of radiation transmissive members and the fourth group of radiation transmissive members have a positional relationship such that they are rotated substantially 60 degrees relative to each other around the optical axis.
6 more elements
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength, comprising:
- at least one isometric system refractive member made of an isometric system crystal material that transmits a light beam having the predetermined wavelength;
- and
- an amorphous refractive member made of an amorphous material for compensating for deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member,
- wherein the isometric system refractive member made of the isometric system crystal material includes a plurality of isometric system refractive members,
- wherein directions of the crystal axes of the plurality of isometric system refractive members are respectively determined in such a manner that the deterioration of the optical performance due to intrinsic birefringence is reduced,
- wherein the plurality of isometric system refractive members comprises:
- a fifth group of radiation transmissive members which are formed in such a manner that a crystal axis [110], or a crystal axis that is optically equivalent to the crystal axis [110], substantially coincides with the optical axis;
- and
- a sixth group of radiation transmissive members which are formed in such a manner that the crystal axis [110], or the crystal axis that is optically equivalent to the crystal axis [110], substantially coincides with the optical axis;
- and
- wherein the fifth group of radiation transmissive members and the sixth group of radiation transmissive members have a positional relationship such that they are rotated substantially 90 degrees relative to each other around the optical axis.
8 more elements
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength, comprising:
- at least one isometric system refractive member made of an isometric system crystal material that transmits a light beam having the predetermined wavelength, and
- an amorphous refractive member made of an amorphous material for compensating for deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member,
- wherein the isometric system refractive member made of the isometric system crystal material includes a plurality of isometric system refractive members,
- wherein directions of the crystal axes of the plurality of isometric system refractive members are respectively determined in such a manner that the deterioration of the optical performance due to intrinsic birefringence is reduced, and
- wherein the plurality of isometric system refractive members comprises:
- a first group of radiation transmissive members which are formed in such a manner that the crystal axis [100], or a crystal axis that is optically equivalent to the crystal axis [100], substantially coincides with the optical axis;
- and
- a fifth group of radiation transmissive members which are formed in such a manner that a crystal axis [110], or a crystal axis that is optically equivalent to the crystal axis [110], substantially coincides with the optical axis.
5 more elements
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength, comprising:
- at least one isometric system refractive member made of an isometric system crystal material that transmits a light beam having the predetermined wavelength;
- an amorphous refractive member made of an amorphous material for compensating for deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member;
- a seventh group of radiation transmissive members formed in such a manner that a predetermined crystal axis substantially coincides with the optical axis;
- and
- an eighth group of radiation transmissive members formed in such a manner that the predetermined crystal axis substantially coincides with the optical axis;
- wherein the isometric system refractive member made of the isometric system crystal material includes a plurality of isometric system refractive members,
- wherein the crystal axis direction of the plurality of isometric system refractive members is determined in such a manner that the deterioration of the optical performance due to intrinsic birefringence is reduced, and
- wherein an equation
- |L7−L8|/λ<3×10+5
- is satisfied, wherein L7 is an optical path length when the light beam corresponding to a maximum numerical aperture of the projection optical system passes through the seventh group of radiation transmissive members, L8 is an optical path length when the light beam corresponding to the maximum numerical aperture of the projection optical system passes through the eighth group of radiation transmissive members, and λ is the predetermined wavelength.
7 more elements
A projection optical system in which an image of a first surface is projected onto a second surface based on a light beam having a predetermined wavelength, comprising:
- a plurality of isometric system refractive members each made of an isometric system crystal material that transmits a light beam having the predetermined wavelength;
- and
- an amorphous refractive member made of an amorphous material for compensating for deterioration of optical performance due to intrinsic birefringence of the isometric system refractive member;
- wherein directions of the crystal axes of the plurality of isometric system refractive members are respectively determined in such a manner that the deterioration of the optical performance due to intrinsic birefringence is reduced;
- and
- wherein the amorphous refractive member has an internal stress birefringence distribution which reduces a residual deterioration of an optical performance.
3 more elements
Dependencies are inferred from the claim text.