Active matrix LCD panel
AssigneeNEC LCD Technologies, Ltd.
InventorsSatoshi Ihida, Hirotaka Yamaguchi, Hiroaki Tanaka, Takasuke Hayase, Hiroshi Kanou, Wakahiko Kaneko, Tae Miyahara, Michiaki Sakamoto, Shinichi Nakata
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Abstract
A method for fabricating an active matrix LCD panel for use in an active matrix LCD device includes the step of forming a passivation layer acting as a channel protection layer for protecting an amorphous silicon active layer, thereby reducing the number of photolithographic steps. A transparent conductive film is used for forming a gate electrode and a pixel electrode before formation of an amorphous silicon film for the TFTs.
Claims17
An active matrix liquid crystal display panel for use in an active matrix liquid crystal display device, comprising:
- a transparent insulating substrate;
- a plurality of pixels arranged on said transparent insulating substrate and each comprising a pixel electrode and an associated thin film transistor;
- and
- a passivation layer covering said plurality of pixels,
- said thin film transistor comprising:
- a gate electrode comprising a transparent conductive film and a metallic film consecutively formed on said transparent insulating substrate,
- a gate insulating film covering said gate electrode,
- an island amorphous silicon (a-Si) layer formed on said gate insulating film, and
- source and drain electrodes,
- said passivation layer covering said surfaces and atop surface of said a-Si layer and having openings therein,
- said source and drain electrodes contacting said a-Si layer through the respective openings of said passivation layer,
- said pixel electrode comprising a transparent conductive film formed in a common layer with said transparent conductive film of said gate electrode, and
- said source electrode contacting said transparent conductive film of said pixel electrode through one of said openings in said passivation layer.
An active matrix liquid crystal display panel comprising:
- a transparent insulating substrate;
- a plurality of pixels arranged on said transparent insulating substrate and each comprising:
- a pixel electrode;
- a counter electrode;
- and
- an associated thin film transistor;
- and
- a passivation layer covering said plurality of pixels,
- said thin film transistor comprising:
- a gate electrode comprising a transparent conductive film and a metallic film consecutively formed on said transparent insulating substrate;
- a gate insulating film covering said gate electrode;
- an island amorphous silicon (a-Si) layer formed on said gate insulating film;
- and
- source and drain electrodes,
- said passivation layer covering side surfaces and a top surface of said a-Si layer and having openings therein,
- said source and drain electrodes contacting said a-Si layer through the respective openings of said passivation layer,
- said counter electrode comprising a transparent conductive film formed in a common layer with said transparent conductive film of said gate electrode,
- said source electrode contacting said transparent conductive film of said pixel electrode through one of said openings in said passivation layer.
An active matrix liquid crystal display panel, comprising:
- a gate electrode on a substrate;
- a pixel electrode on said substrate;
- a channel layer over said gate electrode;
- and
- a passivation layer on said channel layer and covering a top and sides of said channel layer.
Dependencies are inferred from the claim text.