Wafer-level burn-in and test
AssigneeFormFactor, Inc.
InventorsIgor Y. Khandros, David V. Pedersen
Life of this patent
Estimating the term…
Abstract
Techniques for performing wafer-level burn-in and test of semiconductor devices include a test substrate having active electronic components such as ASICs mounted to an interconnection substrate or incorporated therein, metallic spring contact elements effecting interconnections between the ASICs and a plurality of devices-under-test (DUTs) on a wafer-under-test (WUT), all disposed in a vacuum vessel so that the ASICs can be operated at temperatures independent from and significantly lower than the burn-in temperature of the DUTs. The spring contact elements may be mounted to either the DUTs or to the ASICs, and may fan out to relax tolerance constraints on aligning and interconnecting the ASICs and the DUTs. Physical alignment techniques are also described.
Claims21
A method for exercising an electronic device, said method comprising:
- bringing a test substrate into contact with said electronic device, said test substrate including active electronics;
- receiving at said test substrate exercise data from a controller;
- processing said received exercise data with said active electronics;
- and
- exercising said electronic device in accordance with said processed exercise data,
- wherein said exercise data comprises test commands, and said processing comprises generating test vectors from said commands for testing said electronic device.
A method for exercising an electronic device, said method comprising:
- bringing a test substrate into contact with said electronic device, said test substrate including active electronics;
- receiving at said test substrate exercise data from a controller;
- processing said received exercise data with said active electronics;
- and
- exercising said electronic device in accordance with said processed exercise data;
- wherein said exercising comprises testing said electronic device;
- analyzing results of said testing with said active electronics;
- and
- stopping said testing if said electronic device fails a portion of said testing.
An apparatus comprising:
- a substrate;
- and
- active electronics disposed on said substrate, said active electronics configured to process exercise data received from a controller and output said processed exercise data for exercising an electronic device,
- wherein said exercise data comprises test commands, and said active electronics processes said test commands by generating test vectors for testing said electronic device.
An apparatus comprising:
- a substrate;
- and
- active electronics disposed on said substrate, said active electronics configured to process exercise data received from a controller and output said processed exercise data for exercising an electronic device,
- wherein said active electronics if is further configured to monitor results of testing of said electronic device, and
- wherein said active electronics is further configured to stop testing of said electronic device if said electronic device fails a portion of said testing.
An apparatus comprising:
- a substrate;
- active electronics disposed on said substrate, said active electronics configured to process exercise data received from a controller and output said processed exercise data for exercising an electronic device;
- and
- capture pads configured to make electrical connections with resilient contact structures on said electronic device.
An apparatus comprising:
- interconnection means for providing an interface between a controller and an electronic device;
- and
- data processing means for processing exercise data received from said controller and outputting said processed exercise data for exercising said electronic device, said data processing means disposed on said interconnection means,
- wherein said exercise data comprises test commands, and said data processing means processes said test commands by generating test vectors for testing said electronic device.
An apparatus comprising:
- interconnection means for providing an interface between a controller and an electronic device;
- data processing means for processing exercise data received from said controller and outputting said processed exercise data for exercising said electronic device, said data processing means disposed on said interconnection means;
- monitoring means for monitoring results of testing of said electronic device, said monitoring means disposed on said interconnection means;
- and
- stopping means for stopping testing of said electronic device if said electronic device fails a portion of said testing.
Dependencies are inferred from the claim text.