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US 6,788,082 B2Granted
Probe card
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorMasayoshi Hirao
Life of this patent
Estimating the term…
Abstract
A balance resistance is connected to each probe pin and a probe card check wire is provided on each probe pin, and thus a wafer test and chip test with application of high current can be performed, and further, a maintenance of a probe card is facilitated.
Claims3
A probe card for use in a performance test of a chip of a semiconductor device in a production process of the semiconductor device, the probe card comprising:
- a plurality of probe pins for flowing a high current therethrough for the test, each of the probe pins having a balance resistance connected thereto in series, each balance resistance having a value greater than a contact resistance between each of the probe pins and a chip pad of the semiconductor device which are brought into contact with each other;
- and
- a plurality of contact check wires for checking a contact performance of each of the probe pins, wherein each of the contact check wires is drawn from a junction point positioned between each of the probe pins and a corresponding balance resistance connected thereto.
Dependencies are inferred from the claim text.