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US 6,787,970 B2Granted
Tuning of packaged film bulk acoustic resonator filters
AssigneeIntel Corporation
InventorsDong S. Shim, Jose Maiz, Li-Peng Wang, Qing Ma, Valluri Rao
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Abstract
Packaged film bulk acoustic resonators may be tuned after packaging by exposing them to irradiation. In one embodiment, transparent covers may be provided so that the film bulk acoustic resonator filter may be exposed to laser irradiation to either add or remove material from the filter and to thereby adjust its frequency.
Claims27
A method comprising:
- exposing a pair of irradiation alterable layers of a film bulk acoustic resonator to irradiation through a cover;
- and
- changing the frequency of said resonator through said exposure by altering one but not the other of said irradiation alterable layers.
A film bulk acoustic resonator comprising:
- a first electrode;
- a piezoelectric film;
- a second electrode, said piezoelectric film being positioned between said first and second electrodes;
- and
- a pair of irradiation alterable layers, a first of said layers being responsive to irradiation having a first characteristic and the second of said layers being response to irradiation of a second characteristic, said first and second characteristics being different.
2 more elements
A film bulk acoustic resonator comprising:
- a first electrode;
- a piezoelectric film;
- a second electrode, said piezoelectric film being located between said first and second electrodes;
- and
- a package surrounding said first and second electrodes and said piezoelectric film, said package including a pair of opposed light transmissive covers to enable exposure of the interior of said package by different light irradiation sources to change the frequency of said resonator from outside said package.
2 more elements
Dependencies are inferred from the claim text.