Substrate exposure apparatus
AssigneeVIA Technologies, Inc.
InventorKuo-Tso Chen
Life of this patent
Estimating the term…
Abstract
A substrate exposure apparatus, having a display apparatus and a control system. The display apparatus is used to display the pattern and to transfer the pattern to the photoresist, and includes a non-self luminescent display or a self-luminescent display. The control system is used to control the pattern displayed on the display apparatus.
Claims29
A substrate exposure apparatus, applicable to transfer a pattern to a photoresist on a surface of a substrate, the substrate exposure apparatus comprising:
- a display apparatus, to display the pattern and to transfer the pattern to the photoresist, wherein the display apparatus uses a protect film to contact the photoresist;
- and
- a control system, to control the pattern displayed on the display apparatus.
A substrate exposure apparatus, applicable to transfer a pattern to a photoresist on a surface of a substrate, the substrate exposure apparatus comprising:
- a display apparatus, to display the pattern and to transfer the pattern to the photoresist, wherein the substrate includes an integrated circuit substrate;
- and
- a control system, to control the pattern displayed on the display apparatus.
Dependencies are inferred from the claim text.