Thin film transistor array panel
AssigneeSamsung Electronics Co., Ltd.
InventorsMun-Pyo Hong, Woon-Yong Park, Jong-Soo Yoon
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AssigneeSamsung Electronics Co., Ltd.
InventorsMun-Pyo Hong, Woon-Yong Park, Jong-Soo Yoon
Estimating the term…
Simplified method of manufacturing liquid crystal displays. A gate wire including a gate line, a gate pad and a gate electrode is formed on the substrate by using the first mask. A gate insulating layer, a semiconductor layer, a ohmic contact layer and a metal layer are sequentially deposited to make a quadruple layers, and patterned by a dry etch of using the second mask. At this time, the quadruple layers is patterned to have a matrix of net shape layout and covering the gate wire. An opening exposing the substrate is formed in the display area and a contact hole exposing the gate pad is formed in the peripheral area. Next, ITO is deposited and a photoresist layer coated on the ITO. Then, the ITO layer is patterned by using the third mask and a dry etch, and the data conductor layer and the ohmic contact layer not covered by the ITO layer is dry etched. After depositing a passivation layer, a opening is formed by using the fourth mask and the exposed semiconductor layer through the opening is etched to separate the semiconductor layer under the adjacent data line.
A thin film transistor array panel for a liquid crystal display comprising:
The thin film transistor array panel of 7, further including a storage wire formed on the substrate, overlapped with the pixel electrode and covered by the gate insulating layer, wherein the portion of the semiconductor layer sandwiched between the storage wire and the pixel electrode is isolated from the other portion.
Dependencies are inferred from the claim text.