Test vehicle with zig-zag structures
AssigneePDF Solutions, Inc.
InventorsLarg H. Weiland, Christopher Hess
Life of this patent
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Abstract
A test vehicle has a plurality of the zig-zag structures which include: a first layer having a plurality of first elongated patterns oriented in a first direction; a second layer having a plurality of second elongated patterns oriented in a second direction substantially perpendicular to the first direction; and a plurality of vias or contacts conductively coupling ones of the first patterns to respective ones of the second patterns.
Claims16
A test vehicle having a plurality of zig-zag structures, wherein at least one of the zig-zag structures comprises:
- a first layer having a plurality of first elongated patterns oriented in a first direction;
- a second layer having a plurality of second elongated patterns oriented in a second direction different from the first direction;
- and
- a plurality of vias or contacts conductively coupling ones of the first patterns to respective ones of the second patterns, wherein the zig-zag structures alternate between a clockwise turn and a counter-clockwise turn at each successive via or contact.
A test vehicle having a plurality of zig-zag structures, wherein at least one of the zig-zag structures comprises:
- a first layer having a plurality of first elongated patterns oriented in a first direction;
- a second layer having a plurality of second elongated patterns oriented in a second direction substantially perpendicular to the first direction;
- and
- a plurality of vias or contacts conductively coupling ones of the first patterns to respective ones of the second patterns.
Dependencies are inferred from the claim text.