Apparatus wherein ionizing radiation is generated
AssigneeLEO Elektronenmikroskopie GmbH
InventorDaniel Tobias
Life of this patent
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Abstract
An apparatus, which generates ionizing radiation, includes a column having a sandwich-like configuration. The column includes one or more tubes and a layer of a cured epoxy-resin mixture containing a heavy metal. The layer of epoxy-resin mixture adheres to the tube or, if the several tubes are provided, the layer adheres to the tubes. In this way, the layer defines a unit with the tube or tubes. The configuration of the apparatus provides a configuration, which is tight against exiting X-ray radiation, also in regions of breakouts and tube transitions.
Claims51
An apparatus wherein ionizing radiation is generated, the apparatus comprising:
- a tube having an inner surface defining an interior space;
- particle-optical components supported in said interior space by said tube;
- a layer of cured epoxy-resin mixture containing a heavy metal and surrounding said tube on the outside thereof;
- and,
- said layer of cured epoxy-resin mixture defining a unit adhering to said tube.
An apparatus wherein ionizing radiation is generated, the apparatus comprising:
- an outer tube;
- an inner tube mounted within said outer tube;
- said outer and inner tubes conjointly defining an annular space therebetween;
- an epoxy-resin mixture filling out said annular space and said epoxy-resin mixture containing a heavy metal;
- and,
- said epoxy-resin mixture adhering to at least one of said outer and inner tubes.
A manipulator for a particle-optical apparatus including an electron microscope, the manipulator comprising:
- a support structure;
- a layer of an epoxy-resin mixture disposed on said support structure;
- and, said epoxy-resin mixture containing a heavy metal.
A manipulator for a particle-optical apparatus including an electron microscope, the manipulator comprising:
- a support structure;
- a layer of an epoxy-resin mixture disposed on said support structure;
- said epoxy-resin mixture containing a heavy metal;
- and, said layer of said epoxy-resin mixture adhering to said support structure.
An apparatus wherein ionizing radiation is generated, the apparatus comprising:
- a tube made of steel and having an inner surface defining an interior space;
- particle-optical components supported in said interior space by said tube;
- a layer of cured epoxy-resin mixture containing a heavy metal and surrounding said tube on the outside thereof;
- and,
- said layer of cured epoxy-resin mixture defining a unit adhering to said tube.
An apparatus wherein ionizing radiation is generated, the apparatus comprising:
- an outer tube made of steel;
- an inner tube made of steel and mounted within said outer tube;
- said outer and inner tubes conjointly defining an annular space therebetween;
- an epoxy-resin mixture filling out said annular space and said epoxy-resin mixture containing a heavy metal;
- and,
- said epoxy-resin mixture adhering to at least one of said outer and inner tubes.
Dependencies are inferred from the claim text.