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AssigneesYoshikazu Nakayama, Daiken Chemical Co., Ltd., Seiko Instruments Inc.
InventorsYoshikazu Nakayama, Seiji Akita, Akio Harada, Takashi Okawa, Yuichi Takano, Masatoshi Yasutake, Yoshiharu Shirakawabe
Estimating the term…
A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.
A conductive probe for a scanning type microscope that obtains substance information of a surface of a specimen by a conductive nanotube probe needle which is adhered to a cantilever, characterized in that said probe comprises a conductive film formed on said cantilever, a conductive nanotube of which base end portion is disposed in contact with a surface of a predetermined portion of said cantilever, and a conductive deposit which is coated from said base end portion of said conductive nanotube to a part of said conductive film so as to fasten said conductive nanotube, wherein said conductive nanotube and said conductive film are caused to be electrically connected by said conductive deposit.
A conductive probe for a scanning type microscope that obtains substance information of a surface of specimen by a tip end of a conductive nanotube probe needle which is fastened to a cantilever, characterized in that said probe comprises a conductive film formed on a surface of said cantilever, a conductive nanotube of which base end portion is disposed in contact with a surface of a predetermined portion of said conductive film, and a conductive deposit that is coated on the base end portion of said conductive nanotube so as to fasten said conductive nanotube, wherein said conductive nanotube and said conductive film are caused to be electrically connected by said conductive deposit.
A conductive probe for a scanning type microscope that obtains substance information of a surface of specimen by a tip end of a conductive nanotube probe needle which is fastened to a cantilever, characterized in that said probe comprises a conductive nanotube of which base end portion is disposed in contact with a surface of a predetermined portion of said cantilever, a conductive deposit which is coated on said base end portion so as to fasten said conductive nanotube to said cantilever, and a conductive coating film which is formed so as to cover from said conductive deposit to said conductive nanotube and said cantilever, wherein said conductive nanotube and said conductive film are caused to be electrically connected.
Dependencies are inferred from the claim text.