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US 6,787,734 B2Granted
System and method of laser drilling using a continuously optimized depth of focus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorXinbing Liu
Life of this patent
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Abstract
A method of adjusting depth of focus in a laser milling system includes generating a laser beam having a focal plane, positioning a workpiece in the focal plane with a surface of the workpiece exposed to the laser beam at a point intersecting the focal plane, and adjusting a position of the workpiece or the focal plane to maintain a constant ablation rate on the exposed surface of the workpiece throughout the drilling process.
Claims24
A depth of focus control system for use with a laser drilling system, comprising:
- a laser beam having a focal plane;
- a workpiece, wherein a surface of the workpiece is exposed to the laser beam at a point intersecting the focal plane;
- and
- a control module operable to adjust position of said workpiece as a function of ablation rate of material of said workpiece respective of said laser beam, thereby maintaining a constant ablation rate on the exposed surface of said workpiece throughout the drilling process.
1 more element
A method of adjusting depth of focus in a laser drilling system, comprising:
- generating a laser beam having a focal plane;
- positioning a workpiece in the focal plane, wherein a surface of the workpiece is exposed to the laser beam at a point intersecting the focal plane;
- and
- adjusting a position of the workpiece as a function of ablation rate of material of said workpiece respective of said laser beam, thereby maintaining a constant ablation rate on the exposed surface of the workpiece throughout the drilling process.
1 more element
Dependencies are inferred from the claim text.