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US 6,787,610 B2Granted
Plasma-resistant fluorine-based elastomer sealing material
AssigneeNichias Corporation
InventorsKazuki Morimoto, Mitsuyuki Nakano, Kazuo Nishimoto
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AssigneeNichias Corporation
InventorsKazuki Morimoto, Mitsuyuki Nakano, Kazuo Nishimoto
Estimating the term…
An elastomer sealing material having low dielectric constant and low dielectric dissipation, which is satisfactory with both of resistance to oxygen plasma and non-adhesion to quartz and can be applied to apparatus utilizing microwaves, is disclosed. The plasma-resistant fluorine-based elastomer sealing material comprises a fluorine-based elastomer having a divalent perfluoropolyether or divalent perfluoroalkylene structure in the main chain thereof and having two or more hydrosilyl groups and addition-reactive alkenyl groups in the terminals or side chains thereof, and a polymer having two or more hydrosilyl groups in the molecule and being capable of addition reacting with the alkenyl groups, the fluorine-based elastomer being crosslinked with the polymer.
A plasma-resistant fluorine-based elastomer sealing material comprising a fluorine-based elastomer having a divalent perfluoropolyether or divalent perfluoroalkylene structure in the main chain thereof and having two or more hydrosilyl groups and addition-reactive alkenyl groups in the terminals or side chains thereof, and a polymer having two or more hydrosilyl groups in the molecule and being capable of addition reacting with the alkenyl groups, the fluorine-based elastomer being crosslinked with the polymer, wherein the sealing material has a dielectric constant of 2.5 or less and a dielectric dissipation of 0.01 or less in a microwave band of from 1 GHz to 30 GHz.
Dependencies are inferred from the claim text.