Selected acid generating agents and their use in processes for imaging radiation-sensitive elements

An acid generating agent selected from the group consisting of compounds of the formula:

• Ar1—N2+R1—X—YO3−;
• wherein:
• Ar1—N2+ is 2-methoxy-4-(phenylamino)-benzenediazonium;
• R1 is an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group;
• X is selected from the group consisting of oxygen, sulfur and selenium;
• and
• Y is selected from the group consisting of sulfur, selenium and tellurium.

A radiation-sensitive patterning composition comprising:

• (1) at least one acid generating compound selected from the compounds of formulae (I), (II), and (III):
• (2) at least one cross-linking agent cross-linkable by the acid;
• (3) at least one polymer compound having at least one functional group capable of reading with the cross-linking agent;
• and
• (4) at least one infrared absorbing agent;
• wherein:
• R1 is an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group;
• X is selected from the group consisting of oxygen, sulfur and selenium;
• Y is selected from the group consisting of sulfur, selenium and tellurium;
• Ar1 is an unsubstituted and substituted aryl group;
• R2, R3 and R4 are each individually an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group or any two of them are bonded together to form a ring structure;
• and
• R5 and R6 are each individually an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group, or are bonded to each other to form a ring structure.

A radiation-sensitive patterning composition comprising:

• (1) at least one acid generating compound selected from the compounds of formulae (I), (II), and (III):
• (2) at least one cross-linking agent cross-linkable by the acid;
• and
• (3) at least one polymer compound having at least one functional group capable of reacting with the cross-linking agent;
• wherein:
• R1 is an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group;
• X is selected from the group consisting of oxygen, sulfur and selenium;
• Y is selected from the group consisting of sulfur, selenium and tellurium;
• Ar1 is an unsubstituted and substituted aryl group;
• R2, R3 and R4 are each individually an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group or any two of them are bonded together to form a ring structure;
• and
• R5 and R6 are each individually an unsubstituted or substituted alkyl group or an unsubstituted or substituted aryl group, or are bonded to each other to form a ring structure.