Adhesively bonded chip-and wafer stacks
AssigneeInfineon Technologies AG
InventorsRecai Sezi, Andreas Walter
Life of this patent
Estimating the term…
Abstract
The present invention describes the use of poly-o-hydroxy amides (PHAs) for adhesively bonding articles or materials, especially components used in the semiconductor industry, such as chips and wafers, a process for adhesively bonding materials, especially chips and/or wafers, chip and/or wafer stacks produced by the process, and adhesive compositions which comprise the poly-o-hydroxy amides of the formula (I).
Claims32
A method of adhesively bonding materials or components, comprising:
- (a) providing a poly-o-hydroxy amides of the following general formula (I):
- where a and d independently of one another are 0 or 1, b=0-100, and c=0-100;
- where X if a or d=0, i.e., if X is attached to NH, has the following definition:
- —H, alkylcarbonyl, alkenylcarbonyl, cycloalkenylcarbonyl, arylcarbonyl, aralkylcarbonyl, aralkenylcarbonyl, aralkynylcarbonyl or heterocycloalkylcarbonyl each unsubstituted or substituted, it being possible for the carbonyl group to be attached to the aromatic moiety, heterocycle, or alkyl, alkenyl or alkynyl group;
- and X if a or d=1, i.e., if X is attached to CO. has the following definition:
- hydroxy, substituted or unsubstituted alkoxy, alkenoxy, aryloxy, cycloalkenoxy, amino, alkylamino, alkenylamino, arylamino, arylalkenoxy, arylalkylamino;
- Y1 to Y4 independently of one another have the following definition:
- substituted or unsubstituted aryl, a substituted or unsubstituted polynuclear aromatic hydrocarbon compound, a substituted or unsubstituted fused ring system, or alkyl, alkenyl, alkynyl, aralkyl, aralkenyl, aralkynyl, heterocyclo or cycloalkenyl each unsubstituted or substituted;
- Z1 to Z3 have the following definition, where Z1 to Z3 can be identical to or different than one another:
- aryl, aralkyl, aralkenyl, aralkynyl, heteroaryl, a polynuclear aromatic hydrocarbon compound or a fused ring system each unsubstituted or substituted
- (b) applying the poly-o-hydroxy amides to an area of material and/or components to be bonded;
- (c) contacting the areas to be bonded with one another;
- and
- (d) cross-linking the poly-o-hydroxy amides.
Article comprising at least two parts which have been bonded using poly-o-hydroxy amides of the following general formula (I):
- where a and d independently of one another are 0 or 1, b=0-100, and c=0-100;
- where X if a or d=0, i.e., if X is attached to NH, has the following definition:
- —H, alkylcarbonyl, alkenylcarbonyl, cycloalkenylcarbonyl, arylcarbonyl, aralkylcarbonyl, aralkenylcarbonyl, aralkynylcarbonyl or heterocycloalkylcarbonyl each unsubstituted or substituted, it being possible for the carbonyl group to be attached to the aromatic moiety, heterocycle, or alkyl, alkenyl or alkynyl group;
- and X if a or d=1, i.e., if X is attached to CO, has the following definition:
- hydroxy, substituted or unsubstituted alkoxy, alkenoxy, aryloxy, cycloalkenoxy, amino, alkylamino, alkenylamino, arylamino, arylalkenoxy, arylalkylamino;
- Y1 to Y4 independently of one another have the following definition:
- substituted or unsubstituted aryl, a substituted or unsubstituted polynuclear aromatic hydrocarbon compound, a substituted or unsubstituted fused ring system, or alkyl, alkenyl, alkynyl, aralkyl, aralkenyl, aralkynyl, heterocyclo or cycloalkenyl each unsubstituted or substituted;
- Z1 to Z3 have the following definition, where Z1 to Z3 can be identical to or different than one another:
- aryl, aralkyl, aralkenyl, aralkynyl, heteroaryl, a polynuclear aromatic hydrocarbon compound or a fused ring system each unsubstituted or substituted.
Adhesive composition, comprising:
- 10-45% by weight of a poly-o-hydroxy amide the following general formula (I):
- where a and d independently of one another are 0 or 1, b=0-100;
- and c=0-100;
- where X if a or d=0, i.e., if X is attached to NH, has the following definition:
- —H, alkylcarbonyl, alkenylcarbonyl, cycloalkenylcarbonyl, arylcarbonyl, aralkylcarbonyl, aralkenylcarbonyl, aralkynylcarbonyl or heterocycloalkylcarbonyl each unsubstituted or substituted, it being possible for the carbonyl group to be attached to the aromatic moiety, heterocycle, or alkyl, alkenyl or alkynyl group;
- and X if a or d=1, i.e., if X is attached to CO, has the following definition:
- hydroxy, substituted or unsubstituted alkoxy, alkenoxy, aryloxy, cycloalkenoxy, amino, alkylamino, alkenylamino, arylamino, arylalkenoxy, arylalkylamino;
- Y1 to Y4 independently of one another have the following definition:
- substituted or unsubstituted aryl, a substituted or unsubstituted polynuclear aromatic hydrocarbon compound, a substituted or unsubstituted fused ring system, or alkyl, alkenyl, alkynyl, aralkyl, aralkenyl, aralkynyl, heterocyclo or cycloalkenyl each unsubstituted or substituted;
- Z1 to Z3 have the following definition, where Z1 to Z3 can be identical to or different than one another:
- aryl, aralkyl, aralkenyl, aralkynyl, heteroaryl, a polynuclear aromatic hydrocarbon compound or a fused ring system each unsubstituted or substituted, and 55-90% by weight of an organic solvent.
Dependencies are inferred from the claim text.