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US 6,787,048 B2Granted
Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method
AssigneeAgilent Technologies, Inc.
InventorsPaul D. Bradley, Richard C. Ruby, John D. Larson, III
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Abstract
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. The resonator is fabricated on a substrate by fabricating a bottom electrode layer and a piezoelectric (PZ) layer over the bottom electrode layer. A selected portion of the PZ layer is partially etched. Then, a top electrode is fabricated over the selected portion of the PZ layer.
Claims17
A method of fabricating resonator on a substrate, the method comprising:
- fabricating a bottom electrode layer;
- fabricating a piezoelectric (PZ) layer over the bottom electrode layer;
- partially etching a selected portion of the PZ layer leaving a second portion of the PZ layer unetched;
- and
- fabricating a top electrode over the selected partially etched portion of the PZ layer.
2 more elements
A method of fabricating a device, the method comprising:
- depositing a bottom electrode layer on a substrate;
- depositing a piezoelectric (PZ) layer over the bottom electrode layer;
- reducing thickness of a first portion the PZ layer leaving a second portion of the PZ layer at its original thickness;
- and
- depositing a first top electrode over the first portion of the PZ layer forming a first resonator having a first resonant frequency and a second top electrode over a second portion of the PZ layer forming a second resonator having a second resonant frequency.
2 more elements
Dependencies are inferred from the claim text.