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US 6,787,012 B2Granted
Apparatus for the synthesis of layers, coatings or films
OwnerBilly J. Stanberyinventor
Life of this patent
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Abstract
Systems and methods are described for synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.
Claims9
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- and
- a release layer coupled to the raised patterned surface of the reusable tool,
- wherein the first holder is selected from the group consisting of a platten, a roller and a conveyor and wherein the first holder is adapted to hold a plurality of reusable tools.
4 more elements
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- a release layer coupled to the raised patterned surface of the reusable tool;
- and
- a heater coupled to the first holder,
- wherein the heater can establish a temperature within a precursor layer that can be coupled to the second holder, between the release layer and the second holder, of from approximately 520° C. to approximately 635° C.
5 more elements
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- a release layer coupled to the raised patterned surface of the reusable tool;
- and
- a heater coupled to the first holder,
- wherein the heater applies an electrical bias to the reusable tool while simultaneously passing a current pulse through the reusable tool laterally.
5 more elements
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- a release layer coupled to the raised patterned surface of the reusable tool;
- and
- a heater coupled to the first holder,
- wherein the heater includes an electrically biased, heated piston that can be brought into contact with the first holder.
5 more elements
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- a release layer coupled to the raised patterned surface of the reusable tool;
- and
- a heater coupled to the first holder,
- wherein the heater radiatively heats the first holder to a reaction temperature while simultaneously biasing the reusable tool via an electrical contact that is coupled to the reusable tool.
5 more elements
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- and
- a release layer coupled to the raised patterned surface of the reusable tool,
- wherein the release layer includes at least one fluoride selected from the group consisting of CaF2 and SrF2.
4 more elements
An apparatus, comprising:
- a first holder;
- a second holder coupled to the first holder;
- a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
- a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
- a release layer coupled to the raised patterned surface of the reusable tool;
- and
- a circuit coupled to the first holder and the second holder to apply an electrostatic field across the first holder and the second holder.
4 more elements
Dependencies are inferred from the claim text.