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US 6,787,011 B2Granted
Cylindrical target and its production method
AssigneeAsahi Glass Company, Limited
InventorsHiroshi Ueda, Toshihisa Kamiyama, Kouichi Kanda
Life of this patent
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Abstract
A cylindrical target having a cylindrical backing tube and hollow cylindrical target material disposed on an outer circumference of the cylindrical backing tube. The backing tube and the target material are joined via an electroconductive felt present beteween the backing tube and the target material.
Claims12
A cylindrical target comprising:
- a cylindrical backing tube;
- a hollow cylindrical target material disposed on an outer circumference of the cylindrical backing tube;
- and
- an electroconductive felt configured to join said backing tube and said target material and present between said backing tube and said target material.
1 more element
A method of producing a cylindrical target, comprising:
- providing an electroconductive felt on an inner surface of a target material having a hollow cylindrical shape;
- and
- inserting a backing tube into the target material such that said electroconductive felt is positioned between an outer circumferential surface of said backing tube and the inner surface of said target material, whereby said target material is joined to said backing tube to obtain said cylindrical target.
A cylindrical target comprising:
- a cylindrical backing tube;
- a hollow cylindrical target material disposed on an outer circumference of the cylindrical backing tube;
- and
- a compression-deformable electroconductive carbon sheet configured to join said backing tube and said target material and present between said backing tube and said target material.
1 more element
A method of producing a cylindrical target, comprising:
- providing a compression-deformable electroconductive carbon sheet on an inner surface of a target material having a hollow cylindrical shape;
- and
- inserting a backing tube into said target material such that said compression-deformable electroconductive carbon sheet is positioned between an outer circumferential surface of said backing tube and the inner surface of said target material, whereby said target material is joined to said backing tube to obtain said cylindrical target.
Dependencies are inferred from the claim text.