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US 6,786,970 B2Granted
Equipment for fabricating a semiconductor product
AssigneeSamsung Electronics Co., Ltd.
InventorsHyun-Don Oh, Tae-Sin Park
Life of this patent
Estimating the term…
Abstract
A semiconductor fabricating device and method that minimize the influence of a process deteriorating material that is generated during first processes on second processes, when the plurality of processes are continually performed step by step. Operational failures are prevented during the course of the semiconductor fabricating processes, by directing air flow from a location where the second processes are carried out to a location where the first processes are carried out, to carry the process deteriorating gas away from the second processes. This reduces the frequency of failures during processing.
Claims17
A semiconductor fabricating device, comprising:
- an adhesion unit installed on a base body in a production line, the adhesion unit having an adhesion chamber that supplies an adhesion enhancing material that reinforces adhesion between a wafer and a photoresist layer when the photoresist layer is deposited on the wafer and that generates a process deteriorating gas;
- a cooling unit installed in the production line to cool down the wafer transferred from the adhesion unit;
- and
- a bake unit installed in the production line, the bake unit being adapted to bake the wafer having the photoresist layer formed thereon, the baking being susceptible to operational failures if exposed to the process deteriorating gas,
- wherein the bake unit and the cooling unit are installed at a higher level than the adhesion unit, and
- wherein clean air flows downward over the adhesion, cooling, and bake units to carry the process deteriorating gas away from the bake unit and cooling unit.
3 more elements
A semiconductor fabricating device, comprising:
- an adhesion unit installed on a base body in a production line, the adhesion unit having an adhesion chamber that supplies an adhesion enhancing material that reinforces adhesion between a wafer and a photoresist layer when the photoresist layer is deposited on the wafer and that generates a process deteriorating gas;
- a cooling unit installed in the production line to cool down the wafer transferred from the adhesion unit;
- and
- a bake unit installed in the production line, the bake unit being adapted to bake the wafer having the photoresist layer formed thereon, the baking being susceptible to operational failures if exposed to the process deteriorating gas,
- wherein the adhesion unit is installed at a first position, the bake unit is installed at a second position, and the cooling unit is installed at a third position, and
- wherein clean air flows from the second and third positions where the bake unit and cooling unit are installed to the first position where the adhesion unit is installed, to carry the process deteriorating gas away from the bake unit and the cooling unit.
3 more elements
A method of fabricating a semiconductor device comprising:
- performing first semiconductor fabricating processes at a first location installed on a base body in a production line, the first semiconductor fabricating processes generating a process deteriorating gas;
- performing second semiconductor fabricating processes that are dependent on the first semiconductor fabricating processes at a second location and a third location, the second semiconductor fabricating processes being susceptible to operational failures upon exposure to the process deteriorating gas;
- and
- flowing clean air from the second location and the third location to the first location to carry the process deteriorating gas away from the second location and the third location,
- wherein the first semiconductor fabricating processes include supplying an adhesion enhancing material that reinforces adhesion between a wafer and a photoresist layer when the photoresist layer is deposited onto the wafer, and
- wherein the second semiconductor fabricating processes include baking and cooling down the wafer having the photoresist layer thereon.
3 more elements
A semiconductor fabricating device, comprising:
- a first semiconductor process unit installed in a production line that performs first semiconductor fabricating processes and that generates a process deteriorating gas during the first semiconductor fabricating process;
- and
- second semiconductor process units installed in the production line that perform second semiconductor fabricating processes dependent on the first semiconductor fabricating processes, the second semiconductor fabricating processes being susceptible to operational failures if exposed to the process deteriorating gas,
- wherein the first semiconductor process unit is an adhesion unit,
- wherein the second semiconductor process units comprise bake and cooling units, and
- wherein all of the second semiconductor process units are installed so that clean air flows over the first and second semiconductor process units to carry the process deteriorating gas away from the second semiconductor process units.
3 more elements
Dependencies are inferred from the claim text.