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US 6,786,935 B1Granted
Vacuum processing system for producing components
AssigneeApplied Materials, Inc.
InventorEarl G. Powell
Life of this patent
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Abstract
The present invention provides a vacuum processing system for creating processed substrates having a domed lid on at least the transfer chamber. The lid may be provided either convex to the chamber, thus decreasing the volume of the chamber and the amount of microparticulate matter present in the chamber, or concave to the chamber. The invention also provides features to enhance the use of the domed lid, e.g., structural features that decrease lifting of the edges of the lid upon introduction of a vacuum to the chamber.
Claims14
A vacuum processing system, comprising:
- a transfer chamber;
- a lid mounted on the transfer chamber wherein the lid has a curved configuration such that an edge of the lid is sealed to an edge of the transfer chamber and the lid is curved such that a center of the lid gradually increases its distance both horizontally and vertically from the edge of the transfer chamber;
- and
- a transparent window element positioned between the edge of the lid and the edge of the transfer chamber.
1 more element
Dependencies are inferred from the claim text.