Method and apparatus for wireless transfer of chemical-mechanical planarization measurements

An apparatus for transmitting wireless signals from a planarizing device, the planarizing device having a support, a platen, and a carrier movable relative to the support and the platen to planarize a semiconductor substrate engaged by the carrier as the carrier moves relative to the platen, the apparatus comprising:

• a sensor coupled to one of the platen, the carrier and the semiconductor substrate to generate a sensor signal corresponding to a value of a selected property of one of the planarizing device and the semiconductor substrate;
• a wireless transmitter coupled to the sensor and coupled to a plurality of transmitting transducers spaced apart from the wireless transmitter, the transmitter receiving the sensor signal and transmitting a wireless transmitter signal corresponding to the sensor signal to the plurality of transmitting transducers;
• and
• a wireless receiver spaced apart from the wireless transmitter and the plurality of transmitting transducers to receive the transmitter signal, the wireless receiver being generally fixed relative to the support.

An apparatus for storing data generated during planarization of a semiconductor substrate by a planarizing device, the planarizing device having a support, a platen coupled to the support, and a carrier movable relative to the platen to remove material from a semiconductor substrate positioned between the carrier and the platen, the apparatus comprising;

• a sensor coupled to the planarizing device to generate a sensor signal corresponding to a value of a selected property of one of the planarizing device and the semiconductor substrate;
• a memory device coupled to the sensor to receive the sensor signal and store the sensor signal;
• and
• a communication link operatively coupled between the memory device and the output device to transfer the signal from the memory device to the output device, the communication link further including a wireless transmitter and a wireless receiver spaced apart from the wireless transmitter, the wireless transmitter being coupled to a plurality of transmitting transducers spaced apart from the transmitter, the wireless transmitter moving relative to the wireless receiver while the semiconductor substrate is planarized.