Apparatus and method for manufacturing organic EL display device

A process for producing an organic electroluminescence display device comprising a lower electrode, an organic luminescence medium, and an upper electrode, the periphery of the device being sealed with a sealing member, the process comprising the stops of:

• carrying a supporting substrate into a first unit;
• transferring the carried-in supporting substrate from the first unit to a second unit by using a carrying device;
• heating the transferred supporting substrate in the second unit to conduct a dehydrating treatment;
• transferring the dehydrated supporting substrate from the second unit to a third unit by using a carrying device;
• forming the organic luminescence medium and the upper electrode by a vapor depositing device, a sputtering device, an ion plating device, an electron beam evaporation device, a chemical vapor disposition device, a metal oxide chemical vapor deposition device or a plasma enhanced chemical vapor deposition device in the third unit;
• transferring the supporting substrate on which the organic luminescence medium and the upper electrode are formed from the third unit to a fourth unit by using a carrying device;
• and
• sealing the periphery of the organic electroluminescence display device with the sealing member in the fourth unit, wherein the water content in the organic electroluminescence medium after sealing with the sealing member is performed is 0.05% or less by weight.

A process for producing an organic electroluminescence display device comprising a lower electrode, an organic luminescence medium, and an upper electrode, the periphery of the device being sealed with a sealing member, the process comprising the steps of:

• carrying a supporting substrate into a first unit;
• transferring the carried-in supporting substrate from the first unit to a second unit by using a carrying device;
• heating the transferred supporting substrate in the second unit to conduct a dehydrating treatment;
• transferring the dehydrated supporting substrate from the second unit to a third unit by using a carrying device;
• forming the organic luminescence medium and the upper electrode by a vapor depositing device, a sputtering device, an ion plating device, an electron beam evaporation device, a chemical vapor deposition device, a metal oxide chemical vapor deposition device, or a plasma enhanced chemical vapor deposition device in the third unit;
• transferring the supporting substrate on which the organic luminescence medium and the upper electrode are formed from the third unit to the second unit through the first unit by using a carrying device;
• and
• sealing the periphery of the organic electroluminescence display device with the sealing member in the second unit, wherein the water content in the organic electroluminescence medium after sealing with the sealing member is 0.05% or less by weight.