Calorimeter and manufacturing method thereof
AssigneeSeiko Instruments Inc.
InventorsKeiichi Tanaka, Toshimitsu Morooka
Life of this patent
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Abstract
It is an object to obtain a calorimeter characterized by excellent mechanical strength, and a manufacturing method thereof, when a plurality of calorimeters are arranged inside a single substrate. The calorimeter has an absorbent for converting energy of radioactive rays into heat and a resistor for converting heat into an electrical signal using superconductive transition are arranged on a membrane for determining thermal conductivity with the membrane being attached to a substrate, the substrate having a tri-layer structure comprising an etching layer, an etching stop layer and a support substrate, the membrane being arranged separated by the thickness of the etching stop layer and the etching layer.
Claims2
A method of manufacturing a calorimeter, comprising the steps of:
- providing a substrate having a tri-layer structure comprised of an etching layer, an etching stop layer, and a support substrate;
- etching the etching layer to form a hollow portion in a surface of the etching layer;
- depositing a sacrificial layer in the hollow portion of the etching layer;
- flattening the surface of the etching layer;
- forming an insulating film on the flattened surface of the etching layer;
- etching the insulating film;
- forming an absorber over the insulating film for absorbing radiation energy and converting the radiation energy into thermal energy;
- forming a resistor between the absorber and the insulating film for converting thermal energy into an electrical signal;
- and
- etching the sacrificial layer and the etching layer to form a membrane for controlling a thermal discharge from the resistor.
Dependencies are inferred from the claim text.