Arrangement for storing and transporting at least one optical component

Abstract

In an arrangement for storing and transporting at least one optical component, it is the object of the invention to protect the optical components from contamination not only during their storage and transport, but also when installing them in operative condition in the optical projection beam path so as to ensure their readiness for immediate operation. This object is met in that every optical component is fastened in an aligned manner to a carrier that is provided in a vessel, and a manipulator acts on the carrier to transfer the carrier into an optical beam path enclosed by a cleanroom through an airlock opening which is formed when the vessel door is open. The arrangement can be used particularly when optics must be stored and manipulated so as to be protected from environmental influences.

Dependencies are inferred from the claim text.