Method of fabricating a fluid jet printhead
AssigneeHewlett-Packard Development Company, L.P.
InventorsGenbao Xu, Zhizang Chen, Mark Alan Johnstone, John P. Whitlock
Life of this patent
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Abstract
A fluid-jet printhead has a substrate having at least one layer defining a fluid chamber for ejecting fluid. The printhead also includes a resistive layer disposed between the fluid chamber and the substrate wherein the fluid chamber has a smooth planer surface between the fluid chamber and the substrate. The printhead has a conductive layer disposed between the resistive layer and the substrate wherein the conductive layer and the resistive layer are in direct parallel contact. The conductive layer forms at least one void creating a planar resistor in the resistive layer. The planar resistor is aligned with the fluid chamber.
Claims10
A method for creating a planar resistor on a substrate surface, comprising the steps of:
- depositing a insulator layer on the substrate surface;
- depositing a dielectric layer on the insulator layer;
- patterning the dielectric layer to create a resistor area;
- etching the patterned dielectric layer to form a dielectric resistor area, having a resistor length dimension, on the insulator layer;
- depositing a conductive layer on the insulator layer to abut the resistor length dimension of the dielectric resistor area to form the resistor length;
- planarizing the conductive layer and the dielectric resistor area to form a planar resistor area;
- depositing a resistive layer on the planar resistor area;
- patterning the resistive layer to create a resistor width dimension;
- and
- etching the resistive layer to form the resistor width.
Dependencies are inferred from the claim text.