US 6,785,952 B2 · Method for manufacturing a thin film magnetic head

Abstract

A first magnetic film, a gap film, a thin film coil supported by a insulated film and a second magnetic film are formed in turn. The second magnetic film has a pole part opposite to the first magnetic film via the gap film and a yoke part extending backward from the pole part to be magnetically connected to the first magnetic film. The forefront surface of the yoke part is receded from an air bearing surface. The pole part of the second magnetic film has a step d1 in a running direction of a magnetic recording medium and a step d2 in the perpendicular direction to the running direction within the yoke forefront surface and its periphery as is viewed from the yoke forefront surface. A protective film embeds the steps d1 and d2, and covers an inductive type thin film magnetic head element entirely. Thereby, without debasing the overwrite characteristic when the pole part is miniaturized, a thin film magnetic head having a narrowed track width can be provided.

Claims7

Dependent claims

A method for manufacturing a thin film magnetic head, comprising:

forming a first magnetic film, a gap film and a thin film coil supported by an insulated film on a substrate to be a slider;
and
forming thereafter a second magnetic film including:
forming a main magnetic film having a pole part opposite to the first magnetic film via the gap film and a yoke part connected to the first magnetic film backward in the opposite side of the pole part,
forming a pattern of resist around the main magnetic film so as to cover the pole part of the main magnetic film and leave a space between the pattern of the resist and the sides of the pole part in the area within the yoke part from the pole part, and
forming a subsidiary magnetic film in the area surrounded by the resist pattern;
and
partially removing the gap film and the first magnetic film in the both sides of the pole part in its width direction, thereby to form a depressed portion, wherein the partial removing of the gap film and the first magnetic film is carried out after the subsidiary magnetic film is formed.

5 more elements

Dependencies are inferred from the claim text.

Method for manufacturing a thin film magnetic head

Life of this patent

Method for manufacturing a thin film magnetic head

Life of this patent

Abstract

Claims7