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US 6,785,638 B2Granted
Method and system of dynamic learning through a regression-based library generation process
AssigneeTimbre Technologies, Inc.
InventorsXinhui Niu, Nickhil Jakatdar
Life of this patent
Estimating the term…
Abstract
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.
Claims32
A method of determining a first actual profile associated with a first grating comprising:
- receiving a set of measurements associated with a signal indicative of diffraction from the grating;
- generating a first actual spectrum signal data associated with the grating;
- selecting a first trial profile;
- generating a first trial spectrum signal data associated with the first trial profile;
- comparing the first trial spectrum signal data to the first actual spectrum signal data;
- determining parameter values for a second trial profile using at least one optimization technique based on the comparison of the first trial spectrum signal data to the first actual spectrum signal data, wherein the second trial profile is associated with a second sample trial spectrum signet data, and wherein the second trial profile matches the first actual profile more closely than the first trial profile;
- and
- storing the second trial profile and the second sample trial spectrum signal data in a dynamic library of profiles.
5 more elements
A method of determining a profile associated with a grating, comprising:
- receiving a measured signal;
- selecting a set of trial parameter values;
- determining whether the set of trial parameter values is stored in a database, wherein if the set of trial parameter values is stored in the database,
- searching the database for a trial signal associated with the set of trial parameter values,
- and wherein if the set of trial parameter values is not stored in the database, storing the set of trial parameter values in the database,
- performing an electromagnetic simulation associated with the set of trial parameter Values;
- generating a simulated signal, and
- storing the simulated signal in the database or another storage medium.
5 more elements
A computer program product for use in determining a first actual profile associated with a first grating, said computer program product comprising:
- a computer usable medium including computer readable program code embodied in said medium for causing determining the first actual profile;
- computer readable program code for causing a computer to effect receiving a signal indicative of diffraction from the grating;
- computer readable program code for causing said computer to effect generating actual spectrum signal data associated with the grating;
- computer readable program code for causing said computer to effect selecting a first trial profile;
- computer readable program code for causing said computer to effect generating a first trial spectrum signal data associated with the first trial profile;
- computer readable program code for causing said computer to effect comparing the first trial spectrum signal data to the first actual spectrum signal data;
- computer readable program code for causing said computer to effect determining parameter values for a second trial profile using at least one optimization technique based on the comparison of the first trial spectrum signal data to the first actual spectrum signal data, wherein the second trial profile is associated with a second sample trial spectrum signal data, and wherein the second trial profile matches the first actual profile more closely than the first trial profile;
- and
- computer readable program code for causing said computer to effect storing the second trial profile and the second sample trial spectrum signal data in a dynamic library of profiles.
6 more elements
An article of manufacture comprising:
- a computer usable medium including computer readable program code embodied therein for causing determining a first actual profile associated with a first grating, the computer readable program code in said article of manufacture comprising:
- computer readable program code for causing a computer to effect receiving a signal indicative of diffraction from the grating;
- computer readable program code for causing said computer to effect generating actual spectrum signal data associated with the grating;
- computer readable program code for causing said computer to effect selecting a first trial profile;
- computer readable program code for causing said computer to effect generating a first trial spectrum signal data associated with the first trial profile;
- computer readable program code for causing said computer to effect comparing the first trial spectrum signal data to the first actual spectrum signal data;
- computer readable program code for causing said computer to effect determining parameter values for a second trial profile using at least one optimization technique based on the comparison of the first trial spectrum signal data to the first actual spectrum signal data, wherein the second trial profile is associated with a second sample trial spectrum signal data, and wherein the second trial profile matches the first actual profile more closely than the first trial profile;
- and
- computer readable program code for causing said computer to effect storing the second trial profile and the second sample trial spectrum signal data in a dynamic library of profiles.
6 more elements
A computer program product for use in determining a profile associated with a grating, said computer program product comprising:
- a computer usable medium including computer readable program code embodied in said medium for causing determining the profile;
- computer readable program code for causing a computer to effect receiving a measured signal;
- computer readable program code for causing said computer to effect selecting a set of trial parameter values;
- computer readable program code for causing said computer to effect determining whether the set of trial parameter values is cored in a database, wherein if the set of trial parameter values is stored in the database,
- computer readable program code for causing said computer to effect searching the database for a trial signal associated with the set of trial parameter values,
- and wherein if the set of trial parameter values is not stored in the database,
- computer readable program code for causing said computer to effect storing the set of trial parameter values in the database;
- computer readable program code for causing said computer to effect performing an electromagnetic simulation associated with the set of trial parameter values;
- computer readable program code for causing said computer to effect generating a simulated signal;
- and
- computer readable program code for causing a computer to effect storing the simulated signal in the database or another storage medium.
8 more elements
An article of manufacture comprising:
- a computer usable medium including computer readable program code embodied therein for causing determining a profile associated with a grating, the computer readable program code in said article of manufacture comprising:
- computer readable program code for causing a computer to effect receiving a measured signal;
- computer readable program code for causing said computer to effect selecting a set of trial parameter values;
- computer readable program code for causing said computer to effect determining whether the set of trial parameter values is stored in a database, wherein if the set of trial parameter values is stored in the database,
- computer readable program code for causing said computer to effect searching the database for a trial signal associated with the set of trial parameter values,
- and wherein if the set of trial parameter values is not stored in the database,
- computer readable program code for causing said computer to effect storing the set of trial parameter values in the database;
- computer readable program code for causing said computer to effect performing an electromagnetic simulation associated with the set of trial parameter values;
- computer readable program code for causing said computer to effect generating a simulated signal;
- and
- computer readable program code for causing said computer to effect storing the simulated signal in the database or another storage medium.
8 more elements
A system for determining a first actual profile associated with a first grating comprising:
- means for receiving a set of measurements associated with a signal indicative of diffraction from the grating;
- means for generating actual spectrum signal data associated with the grating;
- means for selecting a first trial profile,
- means for generating a first trial spectrum signal data associated with the first trial profile;
- means for comparing the first trial spectrum signal data to the first actual spectrum signal data;
- means for determining parameter values for a second trial profile using at least one optimization technique based on the comparison of the first trial spectrum signal data to the first actual spectrum signal data, wherein the second trial profile is associated with a second sample trial spectrum signal data, and wherein the second trial profile matches the first actual profile more closely than the first trial profile;
- and
- means for storing the second trial profile and the second sample trial spectrum signal data in a dynamic library of profiles.
5 more elements
Dependencies are inferred from the claim text.