Ultraviolet laser device

A narrow band ultraviolet laser device comprising

• a laser chamber with a laser gas being sealed therein, light shielding elements which are in vicinities of light transmitting windows provided at both sides of said laser chamber and on an axis connecting both of said windows, and a light shielding element for shielding part of laser light transmitted through a prism inside a band-narrowing module, said light shielding elements respectively having:
• light transmitting sections for transmitting laser light, and light shielding sections that surround said light transmitting sections, remove undesired laser light from an optical path and shape the laser light into a predetermined form, wherein:
• said light shielding sections are formed of a material including at least any one of aluminum, aluminum alloy and copper,
• the light shielding sections reflect the laser light at high reflectivity, thus causing less light absorption of the light shielding elements and less rise in the temperature of the light shielding sections, and
• as a result, the light shielding sections relieve ununiformity in the temperature of the gases inside the light transmitting sections.

A narrow band ultraviolet laser device comprising light shielding elements having:

• light transmitting sections for transmitting laser light;
• and
• light shielding sections that surround said light transmitting sections, to remove undesired laser light from an optical path and shape the laser light into a predetermined form;
• wherein:
• said light shielding sections include a solid material which transmits laser light and total reflection coating formed on a surface of said solid material, in said solid material section, gases do not exist in the laser light area, and no refraction index distribution caused by temperature distribution of the gases is caused;
• and
• said total reflection coating sections have a function of removing the undesired light from the optical path by reflecting the laser light.

A narrow band ultraviolet laser device comprising:

• undesired laser light removing elements for removing undesired laser light from an optical path and shaping laser light into a predetermined form;
• and
• light transmitting sections bordered by said undesired laser light removing elements, for transmitting the laser light;
• wherein;
• said undesired laser light removing elements are formed of a material which transmits the laser light, thus causing less light absorption of the undesired laser light removing elements and less rise in temperature of the undesired laser light removing sections, and as a result, said undesired laser light moving elements relieve ununiformity in the temperature of the gases inside the light transmitting sections;
• and
• said undesired laser light removing elements have a function of refracting the laser light to remove the undesired laser light from the optical path.

A narrow band ultraviolet laser device comprising light shielding elements having:

• light transmitting sections for transmitting laser light;
• and
• light shielding sections that surround said light transmitting sections, remove undesired laser light from an optical path and shape the laser light into a predetermined form;
• wherein
• said light transmitting sections are formed of a solid which transmits the laser light, therefore gases do not exist in the laser light area, and refraction index distribution caused by the temperature distribution of the gases does not occur.