Electric discharge gas laser
AssigneeEbara Corporation
InventorsAtushi Ooyama, Shinichi Sekiguchi, Hiroyuki Shinozaki, Toshimitsu Barada, Toshiharu Nakazawa
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AssigneeEbara Corporation
InventorsAtushi Ooyama, Shinichi Sekiguchi, Hiroyuki Shinozaki, Toshimitsu Barada, Toshiharu Nakazawa
Estimating the term…
There is provided an electric discharge gas laser comprising a housing, a rotating fan, a bearing device and a control. The housing contains a laser gas. The rotating fan is provided in the housing to circulate the gas in the housing. The bearing device magnetically supports a rotating shaft. The bearing device is provided with a sensor device comprising a sensor and a signal processor. The sensor senses the position of the rotating shaft to generate signals indicating the position of the rotating shaft. The signal processor receives and processes the signals delivered from the sensor to output processed signals. The control is separated from the bearing device and is functionally associated with the bearing device to receive the processed signal from the sensor device for controlling the bearing device on the basis of the processed signals.
An electric discharge gas laser comprising:
Dependencies are inferred from the claim text.