Ferroelectric capacitor and process for its manufacture
AssigneeInfineon Technologies AG
InventorsUlrich Egger, Haoren Zhuang, Karl Hornik
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Abstract
Forming a capacitor, by (a) forming a matrix of ferroelectric capacitor elements on a substrate, (b) forming a CAP layer over the ferroelectric capacitor elements, and (c) etching the CAP layer to a more uniform thickness. A capacitor that has a substrate layer, a matrix of ferroelectric capacitor elements including a first electrode layer substantially fixed relative to the substrate, a second electrode layer, and a ferroelectric layer sandwiched between the first and second electrode layers is disclosed. The capacitor has a shoulder layer extending from the substrate to the matrix, and a CAP layer etched to have substantially constant thickness covering sides of the matrix extending beyond the substrate.
Claims10
A method of forming a capacitor, the method comprising the steps of:
- forming a matrix of ferroelectric capacitor elements on a substrate;
- forming a CAP layer over the ferroelectric capacitor elements;
- and
- etching the CAP layer to provide a CAP layer having a substantially uniform thickness covering sides of the matrix extending beyond the substrate.
A capacitor comprising:
- a substrate layer;
- a matrix of ferroelectric capacitor elements including a first electrode layer substantially fixed relative to the substrate, a second electrode layer, and a ferroelectric layer sandwiched between the first and second electrode layers;
- a shoulder layer extending from the substrate to the matrix;
- and
- a CAP layer etched to have substantially constant thickness covering sides of the matrix extending beyond the substrate.
Dependencies are inferred from the claim text.