Optical routing elements
AssigneePTS Corporation
InventorRonald G. Wendland, Jr.
Life of this patent
Estimating the term…
Abstract
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus (100) for steering light has a base layer (110), a beam layer (114) and a folded flexure assembly (120) coupled therebetween. The folded flexure assembly complete underlies the beam layer, and facilitates rotation of the beam layer relative to the base layer. The flexure assemblies further provide a counter rotation force to help prevent the beam layer from sticking in an actuated position. In one aspect, the base layer includes raised portions (140, 142) which operate as mechanical stops for the beam layer. In this manner, the counter rotation force helps prevent the beam layer from sticking to the base layer or the raised portions.
Claims37
An apparatus for steering light, comprising:
- a base layer;
- a folded flexure assembly coupled to said base layer and completely underlying a beam layer;
- said beam layer overlying and coupled to said folded flexure assembly, said beam layer adapted to rotate relative to said base layer;
- and
- wherein said folded flexure further comprises:
- a first arm coupled to said base layer;
- and
- a second arm coupled to said beam layer;
- wherein said first and second arms are coupled together, with said coupled portion of said first and second arms disposed between said beam layer and said base layer.
An apparatus for steering light, comprising:
- a base layer;
- a folded flexure assembly coupled to said base layer and completely underlying a beam layer;
- said beam layer overlying and coupled to said folded flexure assembly, said beam layer adapted to rotate relative to said base layer;
- and
- further comprising spaced apart first and second raised portions coupled to said base layer, said beam layer adapted to contact said first raised portion when rotated in a first direction and adapted to contact said second raised portion when rotated in a second direction.
An apparatus for steering light, comprising:
- a base layer;
- a folded flexure assembly coupled to said base layer and completely underlying a beam layer;
- said beam layer overlying and coupled to said folded flexure assembly, said beam layer adapted to rotate relative to said base layer;
- and
- wherein said folded flexure assembly is adapted to provide a restoring force to said beam layer when said beam layer is in a rotated state.
An apparatus for steering light, comprising:
- a base layer;
- a folded flexure assembly coupled to said base layer and completely underlying a beam layer;
- said beam layer overlying and coupled to said folded flexure assembly, said beam layer adapted to rotate relative to said base layer;
- and
- wherein said beam layer has a non-rotated state and a rotated state defining an angle therebetween, said angle ranging between about ±1 degree and about ±30 degrees.
An apparatus for steering light, comprising:
- a base layer comprising an electrode;
- a reflective layer;
- a flexure assembly coupled to and between said base layer and said reflective layer;
- wherein said reflective layer rotates relative to said base layer;
- and
- wherein said flexure assembly comprises:
- a first arm coupled to said base layer;
- and
- a second arm coupled to said beam layer;
- wherein said first and second arms are coupled together, with said coupled portion of said first and second arms disposed between said beam layer and said base layer;
- wherein said flexure assembly is adapted to permit an electrode-induced rotation of said beam layer when a voltage is applied to said electrode, said flexure assembly further providing a counter-rotation force generally opposite said electrode-induced rotation.
An apparatus for steering light, comprising:
- a base layer;
- a flexure assembly coupled to said base layer;
- and
- a beam layer overlying and coupled to said flexure assembly, said beam layer adapted to rotate relative to said base layer;
- wherein said flexure assembly is adapted to impart a counter rotation force when said beam layer rotates.
An apparatus for steering light, comprising:
- a base layer;
- first and second spaced apart electrodes overlying said base layer;
- a flexure assembly coupled to said base layer;
- a beam layer coupled to said flexure assembly and overlying said electrodes;
- wherein said flexure assembly is adapted to permit an electrode-induced rotation of said beam layer when a voltage is applied to one of said electrodes, said flexure assembly further providing a counter-rotation force generally opposite said electrode-induced rotation;
- and
- wherein said counter-rotation force prevents said beam layer from remaining in a rotated state when said voltage is removed,
- wherein said counter-rotation force prevents said beam layer from remaining in a rotated state when said voltage is removed.
An apparatus for steering light, comprising:
- a base layer;
- first and second spaced apart electrodes overlying said base layer;
- a flexure assembly coupled to said base layer;
- a beam layer coupled to said flexure assembly and overlying said electrodes;
- wherein said flexure assembly is adapted to permit an electrode-induced rotation of said beam layer when a voltage is applied to one of said electrodes, said flexure assembly further providing a counter-rotation force generally opposite said electrode-induced rotation;
- and
- wherein said flexure assembly comprises first and second arms coupled to said base layer and said beam layer.
A structure for steering light, comprising:
- a base;
- an electrode overlying said base;
- a flexure assembly;
- and
- a reflective layer coupled to said flexure assembly;
- wherein said flexure assembly is adapted to permit said reflective layer to move into a rotated state when a voltage is applied to said electrode, said rotated state having a portion of said reflective layer contacting said base, and said flexure assembly further preventing said reflective layer from remaining in said rotated state when said voltage is removed.
Dependencies are inferred from the claim text.