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US 6,785,033 B2Granted
Optical attenuating device and method of manufacture therefor
AssigneesAgere Systems Inc., TriQuint Technology Holding Co.
InventorsMark M. Meyers, Daxue Xu
Life of this patent
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Abstract
The present invention provides, in one aspect, an optical device, a method of manufacture therefor, and an optical system including the same. The optical device may include a membrane configured to be electrically deformable and reflective. The membrane may further be positioned over a cavity located within a substrate. The device may additionally include a transmissive spacer coupled to the substrate, and a lens coupled to the transmissive spacer and optically aligned with the membrane.
Claims10
An optical device, comprising:
- a membrane configured to be electrically deformable and reflective and positioned over a cavity located within a substrate;
- a transmissive spacer coupled to said substrate and located over said cavity;
- and
- a lens coupled to said transmissive spacer and optically aligned with said membrane, wherein said transmissive spacer has a thickness substantially equal to a focal length of said lens.
1 more element
A method of manufacturing an optical device, comprising:
- positioning a membrane configured to be electrically deformable and reflective over a cavity located within a substrate;
- coupling a transmissive spacer to said substrate such that said transmissive spacer is located over said cavity;
- and
- coupling a lens to said transmissive spacer and optically aligned with said membrane, wherein said transmissive spacer has a thickness substantially equal to a focal length of said lens.
1 more element
Dependencies are inferred from the claim text.