US 6,784,684 B2 · Testing apparatus including testing board having wirings connected to common point and method of testing semiconductor device by composing signals

Abstract

In a testing board (300C), one end of each of a plurality of first wirings (310) and one end of each of a plurality of second wirings (320) are connected to a common point (340). The other end of each of the second wirings (320) is connected to a terminal (12a-12f) of a semiconductor device (10) under test. The second wirings (320) have almost the same length. Signals outputted from drivers of a tester pin (130) to the first wirings (310) are composed at the common point (340), and the composite wave is inputted to the terminal (12a-12f) through each of the second wirings (320). A relay (350) is provided at a midpoint of each of the second wirings (320) and is controlled such that the signals can be inputted to, for example, the terminal (12b) from the driver of the tester pin (130) through one of third wirings (330).

Claims10

Dependent claims

A testing apparatus comprising:

a testing circuit including pin electronics, said pin electronics including a plurality of drivers, each of which can output signals having various waveforms;
and
a testing board for electrically connecting said test circuit and a semiconductor DUT, wherein
said testing board includes:
a plurality of first wirings each having one end connected to a common point and the other end connected to one of said plurality of drivers;
and
a plurality of second wirings each having one end connected to said common point and the other end connected to terminals of said semiconductor device.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

10/198,933Filed 22 Jul 2002

Priority

JP P2001-29100825 Sep 2001

Published

US 2003/0057940 A127 Mar 2003

Granted

31 Aug 2004

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

G01R 31/31924
Stimuli generation or application of test patterns to the device under test [DUT]: voltage or current aspects, e.g. driver, receiver
G01R 31/31905
Tester configuration: interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
G01R 31/31926
Stimuli generation or application of test patterns to the device under test [DUT]: routing signals to or from the device under test [DUT], e.g.…
G01R
Measuring electric variables

Testing apparatus including testing board having wirings connected to common point and method of testing semiconductor device by composing signals

Life of this patent

Testing apparatus including testing board having wirings connected to common point and method of testing semiconductor device by composing signals

Life of this patent

Abstract

Claims10