Use of standoffs to protect atomic resolution storage mover for out-of-plan motion
AssigneeHewlett-Packard Development Company, L.P.
InventorPeter G. Hartwell
Life of this patent
Estimating the term…
Abstract
A micro-machined actuator for use in, among other things, sensors and data storage devices. The actuator includes a stator wafer and a micro-mover positioned adjacent to the stator wafer. Between the stator wafer and the micro-mover are electrodes that are set to specified voltages and that emanate electric fields that position the micro-mover relative to the stator wafer. Also between stator wafer and the micro-mover are bumpers that prevent the electrodes from coming into contact with each other.
Claims15
A method of operating an actuator comprising:
- providing a stator wafer and a micro-mover over and spaced apart from the stator wafer;
- forming stator electrodes on the stator wafer and actuator electrodes on the mirco-mover;
- moving the micro-mover relative to the actuator electrodes by altering the voltages of selected stator electrodes over time;
- and
- preventing physical contact between the stator electrodes and actuator electrodes by providing a bumper comprising a discreet post including a metal between the stator wafer and the micro-mover.
A method of operating an actuator comprising:
- providing a stator wafer having a surface with one or more stator electrodes thereon;
- providing a micro-mover having a surface with one or more actuator electrodes thereon;
- positioning the surface of the micro-mover and the stator wafer spaced apart and in facing opposition to one another;
- moving the micro-mover relative to the stator wafer by applying voltages to selected stator electrodes and actuator electrodes such that electric fields emanating from the stator electrodes and actuator electrodes interact with one another;
- and
- preventing physical contact between the stator electrodes and actuator electrodes by providing a bumper having at least a metal portion between the stator wafer and the micro-mover.
A method of operating an actuator comprising:
- providing a stator wafer having a surface with one or more stator electrodes thereon;
- providing a micro-mover having a surface with one or more actuator electrodes thereon;
- positioning the surfaces of the micro-mover and the stator wafer spaced apart and in facing opposition to one another;
- moving the micro-mover relative to the stator wafer by applying voltages to selected stator electrodes and actuator electrodes such that electric fields emanating from the stator electrodes and actuator electrodes interact with one another;
- and
- preventing contact between the stator electrodes and actuator electrodes by providing a plurality of bumpers between the stator wafer and the micro-mover, wherein said plurality of bumpers comprises a plurality of discreet posts comprising a metal and protruding from said stator wafer surface or said micro-mover surface or both surfaces.
Dependencies are inferred from the claim text.