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AssigneeCanon Kabushiki Kaisha
InventorsMasaki Tokioka, Mitsutoshi Hasegawa, Kazuya Shigeoka, Yutaka Arai
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A non-evaporating getter maintains the adsorbability for the residual gases, and in addition, secures sufficient characteristics particularly even when it experiences a high-temperature and low-vacuum condition in the fabrication process of a display unit. The non-evaporating getter includes a substrate having no function as a getter and a polycrystalline film arranged on the substrate which film contains Ti as the main component and has a host of voids in the interior thereof. A non-evaporating getter is made by forming a polycrystalline film containing Ti as the main component on the concavo-convex surface of the substrate which substrate has concavities and convexities on a surface thereof and has no function as a getter.
A non-evaporating getter wherein said getter comprises:
A non-evaporating getter, wherein said getter comprises a substrate having no function as a getter and a polycrystalline film arranged on the substrate which film contains Ti as the main component and has a host of voids in the interior thereof, wherein the crystal grain size of said polycrystalline film falls within the range from 100 angstroms to 2000 angstroms.
A fabrication method of a non-evaporating getter comprising:
A non-evaporating getter comprising:
Dependencies are inferred from the claim text.