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US 6,784,592 B2Granted
Use of standoffs to protect atomic resolution storage mover for out-of-plane motion
AssigneeHewlett-Packard Development Company, L.P.
InventorPeter G. Hartwell
Life of this patent
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Abstract
A micro-machined actuator for use in, among other things, sensors and data storage devices. The actuator includes a stator wafer and a micro-mover positioned adjacent to the stator wafer. Between the stator wafer and the micro-mover are electrodes that are set to specified voltages and that emanate electric fields that position the micro-mover relative to the stator wafer. Also between stator wafer and the micro-mover are bumpers that prevent the electrodes from coming into contact with each other.
Claims12
An actuator comprising:
- a stator wafer;
- a micro-mover above said stator wafer;
- one or more stator electrodes protruding from a section of a stator wafer surface wherein said section of said stator wafer surface is a substantially flat, continuous plane that is closest to said micro-mover, and wherein said one or more stator electrodes protrude from the same flat, continuous plane on said stator wafer surface;
- one or more actuator electrodes protruding from a section of a micro-mover surface, wherein said section of said micro-mover surface is a substantially flat, continuous plane that is closest to said stator wafer, and wherein said one or micro-mover electrodes protrude from the same flat, continuous plane on said micro-mover surface;
- and
- one or more bumpers positioned on said stator wafer surface or said micro-mover surface or both surfaces, wherein at least one bumper comprises a metal.
3 more elements
Dependencies are inferred from the claim text.