Semiconductor processing tool alignment technique implemented in a FIMS system
AssigneeNewport Corporation
InventorsPaul Bacchi, Paul S. Filipski
Life of this patent
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Abstract
One or more mounting registration points provide alignment between a FIMS system and a specimen handling system that delivers a specimen retrieved from a specimen transport box. The specimen handling system includes one or more mounting points, each cooperating with an alignment fixture to immovably secure the specimen handling system to the FIMS system at a corresponding mounting registration point. This mounting technique provides automatic alignment of the specimen handling system to each mounting registration point of the FIMS system.
Claims17
A front-opening interface mechanical standard (FIMS) system including a transport box in which one or more specimens are stored, the box including a front-opening box cover and a removable box door that opens and closes the front opening of the box, the box being removably mounted to a support, comprising:
- a retractable port door attachable to the box door to selectively move the box door toward or away from the box cover to thereby close or open it;
- a port plate having a port plate aperture through which the box door can move as the port door moves the box door toward or away from the box cover;
- and
- multiple mounting registration points providing spatial alignment between the FIMS system and a specimen handling system that delivers a specimen retrieved from the transport box, the specimen handling system including multiple mounting points cooperating with multiple alignment fixtures to immovably secure the specimen handling system to the FIMS system at corresponding ones of the mounting registration points and thereby provide automatic alignment of the specimen handling system to the mounting registration points of the FIMS system.
A front-opening interface mechanical standard (FIMS) system including a transport box in which one or more specimens are stored, the box including a front-opening box cover and a removable box door that opens and closes the front opening of the box, the box being removably mounted to a support, comprising:
- a retractable port door attachable to the box door to selectively move the box door toward or away from the box cover to thereby close or open it;
- a port plate having a port plate aperture through which the box door can move as the port door moves the box door toward or away from the box cover;
- and
- a mounting registration point providing alignment between the FIMS system and a specimen handling system that delivers a specimen retrieved from the transport box, the specimen handling system including a mounting point cooperating with an alignment fixture to immovably secure the specimen handling system to the FIMS system at the mounting registration point and thereby provide automatic alignment of the specimen handling system to the mounting registration point of the FIMS system.
Dependencies are inferred from the claim text.